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浏览/检索结果: 共3条，第1-3条 帮助 限定条件 发表日期：2014     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Performance and Modeling of a Micro-Grating Accelerometer 期刊论文 JOURNAL OF RUSSIAN LASER RESEARCH, 2014, 卷号: 35, 页码: 602-608 作者:  Feng, Lishuang;  Yao, Baoyin;  Wang, Xiao;  Liu, Weifang;  Liu, Meihua 收藏  |  浏览/下载：2/0  |  提交时间：2020/01/06 micro-grating accelerometer  diffraction gratings  interferometer  direct intensity modulation   The experiment research of gas-assisted ion etching nanograting 会议论文 15th Annual Conference of the Chinese-Society-of-Micro-Nano-Technology (CSMNT) / 4th International Conference of the Chinese-Society-of-Micro-Nano-Technology (CSMNT), Tianjin, PEOPLES R CHINA, 2014-01-01 作者:  Liu, Meihua;  Feng, Di;  Li, Yan;  Yao, Baoyin;  Zhong, Shuai 收藏  |  浏览/下载：3/0  |  提交时间：2020/01/06 nanograting  SEM-FIB dual beam system  ion beam etching  gas-assisted ion etching  exposure time   Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings 期刊论文 IEEE PHOTONICS TECHNOLOGY LETTERS, 2014, 卷号: 26, 页码: 1027-1030 作者:  Yao, Baoyin;  Feng, Lishuang;  Wang, Xiao;  Liu, Meihua;  Zhou, Zhen 收藏  |  浏览/下载：4/0  |  提交时间：2020/01/06 Evanescent wave coupling  subwavelength gratings  MOEMS accelerometer  FIB/SEM dual beam system