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上海微系统与信息技... [48]
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Micro-/Nanocombined Gas Sensors With Functionalized Mesoporous Thin Film Self-Assembled in Batches Onto Resonant Cantilevers
期刊论文
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2012, 卷号: 59, 期号: 12, 页码: 4881-4887
Yu, HT
;
Xu, PC
;
Xia, XY
;
Lee, DW
;
Li, XX
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2013/04/23
Chemical sensor
in-wall modification
mesoporous thin film (MTF)
microelectromechanical systems (MEMS)
resonant cantilever
Functionalized mesoporous thin-film directly self-assembled on resonant-cantilevers for batch-producible chemical sensors
期刊论文
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, 2011, 期号: 0, 页码: 873-876
Yu, H.T.
;
Xu, P.C.
;
Xu, T.G.
;
Li, XX
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2012/08/23
A three-layer model of self-assembly induced surface-energy variation experimentally extracted by using nanomechanically sensitive cantilevers
期刊论文
NANOTECHNOLOGY, 2011, 卷号: 22, 期号: 4, 页码: 45501
Zuo,GM
;
Li,XX
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  |  
浏览/下载:7/0
  |  
提交时间:2012/04/12
IOP PUBLISHING LTD
FUNCTIONALIZED MESOPOROUS THIN-FILM DIRECTLY SELF-ASSEMBLED ON RESONANT-CANTILEVERS FOR BATCH-PRODUCIBLE CHEMICAL SENSORS
期刊论文
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, 期号: 0, 页码: 873-876
Yu,HT
;
Xu,PC
;
Xu,TG
;
Li,XX
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2012/04/12
IEEE
A three-layer model of self-assembly induced surface-energy variation experimentally extracted by using nanomechanically sensitive cantilevers
期刊论文
Nanotechnology., 2011, 卷号: 22, 期号: 4
Zuo, Guomin
;
Li, XX
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  |  
浏览/下载:11/0
  |  
提交时间:2012/08/23
Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers
期刊论文
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, 期号: 0, 页码: 2574-2577
Chen, Ying
;
Xu, Pengcheng
;
Li, XX
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2012/08/23
A three-layer model of self-assembly induced surface-energy variation experimentally extracted by using nanomechanically sensitive cantilevers
期刊论文
NANOTECHNOLOGY, 2011, 卷号: 22, 期号: 4 Article Number, 页码: 045501
Zuo, GM
;
Li, XX
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  |  
浏览/下载:7/0
  |  
提交时间:2012/05/12
Functionalized mesoporous thin-film directly self-assembled on resonant-cantilevers for batch-producible chemical sensors
会议论文
IEEE MEMS 2011:the 24th IEEE Conference on Micro Electro mechanicsal Systems, 2011
H. T. Yu, P. C. Xu, T. G. Xu, Xinxin Li
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  |  
浏览/下载:13/0
  |  
提交时间:2012/05/04
AXIALLY STRETCHED NANO-THICK PIEZORESISTIVE SILICON CLAMPED-BEAMS TO SENSE SPECIFIC-REACTION-INDUCED DOUBLE-SIDE SURFACE-STRESS WITH MUCH HIGHER SENSITIVITY THAN CANTILEVERS
会议论文
Transducers’11:The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, 2011
Ying Chen, Pengcheng Xu and Xinxin Li
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2012/05/04
Study of GaN epilayers growth on freestanding Si cantilevers
期刊论文
SOLID-STATE ELECTRONICS, 2010, 卷号: 54, 期号: 1, 页码: 4-7
Chen, J
;
Wang, X
;
Wu, AM
;
Zhang, B
;
Wang, X
;
Wu, YX
;
Zhu, JJ
;
Yang, H杨辉
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2011/11/04
FABRICATION
SILICON
MEMS
NITRIDE
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