Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers

	Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers
	Chen, Ying ; Xu, Pengcheng ; Li, XX
刊名	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
	2011
期号	0 页码:2574-2577
通讯作者	Li, X.(xxli@mail.sim.ac.cn)
公开日期	2012-08-23
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/109260]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Chen, Ying,Xu, Pengcheng,Li, XX. Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers[J]. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11,2011(0):2574-2577.
APA	Chen, Ying,Xu, Pengcheng,&Li, XX.(2011).Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11(0),2574-2577.
MLA	Chen, Ying,et al."Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers".2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 .0(2011):2574-2577.