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浏览/检索结果: 共7条，第1-7条 帮助 限定条件 内容类型：会议论文    专题：长春光学精密机械与物理研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar2-CHF3 ion-beam etching through a rectangular photoresist mask (EI CONFERENCE) 会议论文 International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China Tan X. 收藏  |  浏览/下载：20/0  |  提交时间：2013/03/25 In ultraviolet spectroscopy  groove irregularity and surface roughness of nanometer magnitude can cause a significant loss of diffraction efficiency. Therefore  there is a constant need to improve the diffraction efficiency. A blazed grating can concentrate most of the light intensity into a desired diffraction order  it is important to control the groove shape precisely  so it is the optimum choice among gratings of different kinds of profile. As the operating wavelength of most UV spectral applications is less than 200 nm  especially the blaze angle and the apical angle. We have presented a direct shaping method to fabricate EUV blazed gratings by using an ion-beam mixture of Ar+ and CHF2 +to etch K9 glass with a rectangular photoresist mask. With this method  the required blaze angle is small  we have succeeded in fabricating well-shaped UV blazed gratings with a 1200 line/mm groove density and 8.54 blaze angles and 1200 line/mm groove density and 11.68 blaze angles  and the metrical efficiency is about 81% and 78%. The good performance of the gratings was verified by diffraction efficiency measurements. When one uses the etching model  the conditions on the ion-beam grazing incident angle and the CHF3partial pressure should be noted. Besides  since the etched groove shape depends on the aspect ratio of the photoresist mask ridge  if we wish to fabricate larger gratings with this method  we must improve the uniformity of the photoresist mask before ion-beam etching. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).   Linearity measurement for image-intensified CCD (EI CONFERENCE) 会议论文 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China Zhao Y.; Zhang L.; Yan F.; Gu Y.; Wan L. 收藏  |  浏览/下载：22/0  |  提交时间：2013/03/25 To the characteristic of the ultraviolet CCD (UV ICCD)  technique of the linearity measurement of the UV ICCD camera is studied based on the theory of radiometry. Approach of linearity measurement is discussed  and a kind of measurement system of the UV ICCD has been developed based on the method of neutral density filter. It is very important that the transmittance of the filter is independent of the wavelength in the method of neutral density filter. Black metal screen mesh with different transmittance is used in our system  and calibration of the filters' transmittance in different working positions has been done. Meanwhile  to assure the uniform of the received radiation on the target of the detector at any test points  an integrating sphere is placed behind the neutral filter to balance light. The whole measurement system mainly consists of a deuterium lamp with high stabilization  the attenuation film with transmission  integrating sphere  optical guide and electro-shift platform. Auto control is realized via special software during the test. With this instrument  the linearity of the UV ICCD was measured. Experimental results show that the nonlinearity of the UV ICCD under fixed-gain is less than 2% and the uncertainty of measurement system is less than 4%. 2010 Copyright SPIE - The International Society for Optical Engineering.   Resolution performance of extreme ultraviolet telescope (EI CONFERENCE) 会议论文 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, November 19, 2008 - November 21, 2008, Chengdu, China Gao L.; Yang L.; Li D.-S.; Ni Q.-L.; Liang J.-Q.; Chen B. 收藏  |  浏览/下载：21/0  |  提交时间：2013/03/25 Extreme Ultraviolet Telescope (EUT) will image solar corona in four EUV narrow bandpasses defined by multilayered coatings deposited on normal incidence optics. In order to make sure it will get sub-arcsecond angular resolution in the mission we have to test its resolution performance on ground. The EUT is aligned by Zygo interferometer first and a global wavefront error of 0.152 peak to valley is obtained ( = 632.8nm ). Because of the difficulty of angular resolution test for EUT at its operating wavelengths  we test its optical performance at visible and UV band. The method is to place the resolution test-target on the focal plane of collimator and illuminate the target by visible and UV light espectively  then the collimated light will go through EUT and image at focal plane on CCD. By analysis of the images obtained in experiments we conclude that the angular resolution of EUT is 1.22 at visible light ( = 570nm ) which is very close to diffraction limit (1.20) and according to these results we estimate that the operational wavelength resolution is better than 0.32  meets design requirements. While for UV light  the angular resolution is 1.53 that is different from diffraction limit (0.53)  the error comes mainly from large pixel of EUV camera. 2009 SPIE.   Ultraviolet photodetector fabricated from atomic-layer-deposited ZnO films (EI CONFERENCE) 会议论文 Shan C. X.; Zhang J. Y.; Yao B.; Shen D. Z.; Fan X. W.; Choy K. L. 收藏  |  浏览/下载：20/0  |  提交时间：2013/03/25 Zinc oxide (ZnO) films have been prepared on glass substrate in layer-by-layer mode using an atomic-layer deposition (ALD) technique  and a metal-semiconductor-metal structured photodetector has been fabricated on the ZnO films employing interdigital Au as metal contacts. The photodetector shows a cutoff wavelength at around 390 nm and has an obvious responsivity in the whole UVA spectral range. Because the response of the ZnO photodetector covers the whole UV solar irradiation that can reach the earth  the photodetector promises to be useful in monitoring UV solar irradiation to protect people from harm caused by the solar irradiation. Furthermore  the capability of preparing large-area uniform ZnO films of ALD makes it favorable for possible mass production of this kind of photodetector. 2009 American Vacuum Society.   Study on chromaticity balance for LED exposure system (EI CONFERENCE) 会议论文 International Symposium on Photoelectronic Detection and Imaging 2007 - Laser, Ultraviolet, and Terahertz Technology, September 9, 2007 - September 12, 2007, Beijing, China Yao C.-B.; Wang S.-Y.; Rong X.-W.; Meng Z.; Sun W.-J. 收藏  |  浏览/下载：13/0  |  提交时间：2013/03/25 A standard white light compounding algorithm based on combination of CCD illumination acquisition with computer control is presented for LEDs. The computer adjust and control the working current of LEDs by using three-color LEDs illumination acquired by CCD camera  achieved chromaticity coordinates error between compounded white light and standard white light D65 less than the threshold beforehand setted by this technique  then acquiring needed standard white light. Compounded white light meet the chromaticity error demand that is able to be changed  at the same time the CCD illumination acquisition system is eliminated. The proposed algorithm improved the light energy utilization efficiency of LED  and eliminated the offset of central wavelength and chromaticity coordinates due to work current change of LEDs. Experimental results show that the proposed algorithm achieved lesser chromaticity error uv=0.001 relative to standard white light D65  enhanced chromaticity uniformity of illumination field.   Study on chroma balance based on grating spectrometer for LED (EI CONFERENCE) 会议论文 Light-Emitting Diode Materials and Devices II, November 12, 2007 - November 14, 2007, Beijing, China Sun W.-J.; Wang S.-Y.; Yin Y.-Z.; Rong X.-W.; Meng Z. 收藏  |  浏览/下载：19/0  |  提交时间：2013/03/25 A standard white light compounding algorithm based on combination of choma coordinates acquisition system with computer working current control system is presented for three-color LED. The chroma coordinates acquisition system consist of grating spectrometer and integrating sphere. The computer adjust and control the working current of three-color LED  then achieved chroma coordinates error between the compounded white light and standard white light D65  until the chroma coordinates is less than the threshold beforehand set by this technique. The compounded white light meet the chroma error demanded that is able to be changed  at the same time the chroma coordinates acquisition system and the working current control system are eliminated. The proposed algorithm the offset of central wavelength and the change of chroma coordinates due to working current variety for LEDs. Experimental results show that the proposed algorithm achieved lesser chroma error uv=0.001 relative to standard white light D65  enhanced chroma uniformity of illumination field.   Determination of optical constants of zirconia and silica thin films in UV to visible range (EI CONFERENCE) 会议论文 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007, Chengdu, China Jin W.; Jin C.; Zhu H.; Liu L.; Yang H. 收藏  |  浏览/下载：13/0  |  提交时间：2013/03/25 A curve fitting method for determining the optical constants of some dielectric thin films is described with dispersion theory in the paper. A computer program based on Matlab is developed and optimized. The fitting errors are analyzed with theoretical data  which gives very high accurate results. A program is applied to fitting the measured photometric spectra of ion sputtered zirconia and silica thin films in 200-850nm spectra range. The thickness is verified with the method of grazing x-ray diffraction. With the thickness known  the optical constants of zirconia films near the absorption range are obtained with single-wavelength method. As a result  quite good fitting results are obtained with high accuracy. Finally  an ultraviolet (UV) high-pass optical filter is designed with optical constants extracted by this method. The transmission and reflection spectra of the filter are measured and compared to designed spectra. A good coherence was derived.