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Characterization of hafnia thin films made with different deposition technologies 会议论文
Proc. of SPIE, 2011
作者:  Wanjun Ai;  Shengming Xiong
收藏  |  浏览/下载:7/0  |  提交时间:2016/11/25
Influence of APS bias voltage on properties of HfO2 and SiO2 single layer deposited by plasma ion-assisted deposition 期刊论文
chinese optics letters, 2011, 期号: 9
Zhu MP(朱美萍); Yi K(易葵); Fan ZX(范正修); Shao JD(邵建达)
收藏  |  浏览/下载:22/0  |  提交时间:2012/05/07


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