Semiconductor material having si-doped gainp cap layer
MAEDA SHIGEO; TOYAMA OSAMU; WATABE SHINICHI
1992-10-05
著作权人MITSUBISHI CABLE IND LTD
专利号JP1992278522A
国家日本
文献子类发明申请
其他题名Semiconductor material having si-doped gainp cap layer
英文摘要PURPOSE:To obtain semiconductor material wherein propagation of a crosshatched pattern and dislocation which are caused by a GaAsP substrate and peculiar to a GaInP layer is prevented, and the ohmic resistance value to an electrode is decreased. CONSTITUTION:GaInP layers 2, 3 and an Si-doped GaInP layer 4 are formed on a GaAsP substrate When a GaInP epitaxial layer 4 doped with Si is formed, a layer of low dislocation density having a flat surface is obtained, and the ohmic property between the Si-doped GaInP layer 4 and an electrode is improved. Hence, when an LED or an LD is formed on the semiconductor material obtained by this invention, the quality and the reliability can remarkably be improved. The above material is especially effective for orange to blue light emitting elements.
公开日期1992-10-05
申请日期1991-03-06
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/65771]  
专题半导体激光器专利数据库
作者单位MITSUBISHI CABLE IND LTD
推荐引用方式
GB/T 7714
MAEDA SHIGEO,TOYAMA OSAMU,WATABE SHINICHI. Semiconductor material having si-doped gainp cap layer. JP1992278522A. 1992-10-05.
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