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	Atomic force microscope scanning head with 3-dimensional orthogonal scanning to eliminate the curved coupling.
	Shi, Y.a,b; Li, W.b; Gao, S.b; Lu, M.b; Hu, X.a
刊名	Ultramicroscopy
	2018
卷号	Vol.190页码:77-80
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2895304
专题	天津大学
作者单位	1.aState Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin, 300072, China 2.bNational Institute of Metrology, Beijing, 100029, China
推荐引用方式 GB/T 7714	Shi, Y.a,b,Li, W.b,Gao, S.b,et al. Atomic force microscope scanning head with 3-dimensional orthogonal scanning to eliminate the curved coupling.[J]. Ultramicroscopy,2018,Vol.190:77-80.
APA	Shi, Y.a,b,Li, W.b,Gao, S.b,Lu, M.b,&Hu, X.a.(2018).Atomic force microscope scanning head with 3-dimensional orthogonal scanning to eliminate the curved coupling..Ultramicroscopy,Vol.190,77-80.
MLA	Shi, Y.a,b,et al."Atomic force microscope scanning head with 3-dimensional orthogonal scanning to eliminate the curved coupling.".Ultramicroscopy Vol.190(2018):77-80.

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