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科研机构
西安交通大学 [3]
华南理工大学 [3]
力学研究所 [1]
清华大学 [1]
北京航空航天大学 [1]
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会议论文 [9]
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Design of temperature compensation for silicon-sapphire pressure sensor
会议论文
2017 IEEE INTERNATIONAL CONFERENCE ON IMAGING SYSTEMS AND TECHNIQUES (IST), 2017-01-01
作者:
Huang Manguo
;
Liu Defeng
;
Lu Chao
;
Guo Zhanshe
;
Li Xin
收藏
  |  
浏览/下载:87/0
  |  
提交时间:2019/12/30
temperature compensation
high temperature
pressure sensors
silicon on sapphire
Packaging a piezoresistive pressure sensor for intracranial pressure monitoring
会议论文
作者:
Meng, Xiawei
;
Zhao, Yulong
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
Biomedical applications
Implantable sensors
Intra-cranial pressure
Miniaturization
Piezo-resistive
Piezoresistive pressure sensors
Silicon bulk micromachining technology
Single-crystal silicon wafers
Micro acoustic devices using piezoelectric films
会议论文
INTEGRATED FERROELECTRICS, 17th International Symposium on Integrated Ferroelectrics, Shanghai, PEOPLES R CHINA, Web of Science
Ren, TL
;
Zhu, YP
;
Yang, Y
;
Wu, XM
;
Zhang, NX
;
Liu, LT
;
Li, ZJ
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  |  
浏览/下载:3/0
The intelligent pressure sensor system based on DSP
会议论文
作者:
Yang, Chuan
;
Li, Chen
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  |  
浏览/下载:4/0
  |  
提交时间:2019/12/18
Control and automation
Diffused silicon
High-precision
Industrial control computer
Intelligent pressure sensor
Intelligent sensors
Pressure and temperature
Temperature drifts
The application of RBF neural network in the compensation for temperature drift of the silicon pressure sensor
会议论文
作者:
Yang, Chuan
;
Li, Chen
;
Zhang, Chao
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/18
Diffused silicon
RBF Neural Network
Silicon pressure sensors
Temperature characteristic
Temperature drifts
Two-dimension
A micro diffuser/nozzle pump with fins on the sidewall
会议论文
4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, June 10, 2007 - June 14, 2007
作者:
Li XH
;
Yu XM
;
Zhang DC
;
Li ZH
;
Xu WH
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  |  
浏览/下载:14/0
  |  
提交时间:2017/06/01
Diffuser/nozzle
Diffuser/nozzle pump
Fins
Flow efficiency
International conferences
Key parts
Novel methods
Pump performance
Silicon micro-machining
Solid-state sensors
High-current injection in Spreading-Resistance Temperature sensor on SOI (EI收录)
会议论文
Proceedings of the IEEE Hong Kong Electron Devices Meeting, Hong Kong, China, June 22, 2002
作者:
Wu, Z.H.[1]
;
Lai, P.T.[1]
;
Li, Bin[2]
;
Sin, J.K.O.[3]
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/04/19
Doping (additives)
Electric conductivity
Electron devices
Physics
Semiconductor doping
Silicon
Silicon compounds
Temperature sensors
Thick films
Thin films
Study on predicting the deformed membranes based on silicon nitride materials with new deflection functions for calculating the capacitance o (EI收录)
会议论文
Advanced Materials Research, Guangzhou, China, April 13, 2013 - April 14, 2013
作者:
Suo, Xu Dong[1]
;
Sun, Wei Jie[1]
;
Sun, Zheng Dong[2]
;
Yeow, John T. W.[3]
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  |  
浏览/下载:3/0
  |  
提交时间:2019/04/15
Capacitance
Capacitive sensors
Deflection (structures)
Diaphragms
Forecasting
Information science
Materials science
Membranes
Silicon nitride
Modeling and simulation of high temperature optical-fiber SiC-based pressure sensor (EI收录)
会议论文
2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009, Changchun, China, August 9, 2009 - August 12, 2009
作者:
Zhang, Dongzhi[1]
;
Hu, Guoqing[1]
;
Zeng, Gengxin[1]
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/04/17
Chemical stability
Computer simulation
Deformation
Fibers
Measurement errors
Mechatronics
Mirrors
Pressure sensors
Pressure transducers
Silicon carbide
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