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科研机构
北京大学 [2]
西安交通大学 [1]
华南理工大学 [1]
内容类型
期刊论文 [4]
发表日期
2015 [4]
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Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation
期刊论文
Micro & Nano Letters, 2015, 卷号: 10, 期号: [db:dc_citation_issue], 页码: 491-495
作者:
Zhao, Yulong
;
Li, Cun
;
Hao, Mengmeng
;
Cheng, Rongjun
;
Fan, Xiaole
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
thin film
finite element method
flammable areas
fibre conducts
light intensity modulation
silicon compounds
microsensors
bulk micromachining technology
optical microelectromechanical-system pressure sensor
combustible areas
optical cables
intensity modulation
pressure sensors
silicon diaphragm deformation
micromachining
pressure measurement
finite element analysis
optical cable
reflected light intensity shift
pressure 0 MPa to 20 MPa
signal transmission
photoelectric detection circuit
micro-optomechanical devices
elemental semiconductors
optical modulation
thin films
source light
silicon
fibre optic sensors
Gold nanoparticles-decorated graphene field-effect transistor biosensor for femtomolar MicroRNA detection
期刊论文
BIOSENSORS & BIOELECTRONICS, 2015
Cai, Bingjie
;
Huang, Le
;
Zhang, Hong
;
Sun, Zhongyue
;
Zhang, Zhiyong
;
Zhang, Guo-Jun
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2017/12/03
MicroRNA detection
Graphene
Gold nanoparticles
Field-effect transistor biosensor
Peptide nucleic acid
SILICON NANOWIRE BIOSENSORS
LABEL-FREE MICRORNAS
DNA HYBRIDIZATION
PROTEIN-DETECTION
OXIDE
EXPRESSION
SENSORS
BINDING
MIRNAS
CANCER
Silicon on insulator pressure sensor based on a thermostable electrode for high temperature applications
期刊论文
Micro & Nano Letters, 2015
Liu, G. D.
;
Cui, W. P.
;
Hu, H.
;
Zhang, F. S.
;
Zhang, Y. X.
;
Gao, C. C.
;
Hao, Y. L.
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2017/12/03
silicon
elemental semiconductors
silicon-on-insulator
pressure sensors
electrodes
titanium
titanium compounds
platinum
gold
ohmic contacts
thermal stability
transmission lines
Auger electron spectra
measurement errors
calibration
silicon on insulator pressure sensor
thermostable electrode
high temperature applications
thermal stability
ohmic contacts
linear transmission line method
Auger electron spectroscopy
calibration
nonlinearity error
sensitivity
pressure 3
DIFFUSION BARRIER
Output performance of silicon pressure sensor influenced by deformation of sensor substrate (EI收录)
期刊论文
Huanan Ligong Daxue Xuebao/Journal of South China University of Technology (Natural Science), 2015, 卷号: 43, 页码: 1-8
作者:
Hu, Guo-Qing[1]
;
Gong, Xiao-Shan[1]
;
Zhou, Yong-Hong[2]
;
Zou, Chong[2]
;
Alam, Jahangir[1]
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  |  
浏览/下载:4/0
  |  
提交时间:2019/04/25
Deformation
Pressure sensors
Silicon
Silicon sensors
Stresses
Structural optimization
Substrates
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