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Novel electrostatic bidirectional-translation MEMS deformable mirror 期刊论文
Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering, 2012, 卷号: 10, 期号: 4, 页码: 313-317
作者:  Yao, Jun;  Tao, Feng-Gang;  Ren, Hao;  Wang, Wei-Min;  Zhuang, Xu-Ye
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