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On-chip integration of acceleration, pressure, and temperature composite sensor with a single-sided micromachining technique 期刊论文
Journal of Microelectromechanical Systems., 2011, 卷号: 20, 期号: 1, 页码: 42-52
Wang, Quan; Li,XX; Li,T; Bao, Minhang; Zhou, Wei
收藏  |  浏览/下载:9/0  |  提交时间:2012/08/23
On-chip integration of acceleration, pressure, and temperature composite sensor with a single-sided micromachining technique 期刊论文
Journal of Microelectromechanical Systems., 2011, 卷号: 20, 期号: 1, 页码: 42-52
Wang, Quan; Li,XX; Li,T; Bao, Minhang; Zhou, Wei
收藏  |  浏览/下载:9/0  |  提交时间:2012/08/23
On-Chip Integration of Acceleration, Pressure, and Temperature Composite Sensor With a Single-Sided Micromachining Technique 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2011, 卷号: 20, 期号: 1, 页码: 42-52
Wang,QA; Li,XX; Li,T; Bao,MH; Zhou,W
收藏  |  浏览/下载:13/0  |  提交时间:2012/04/12
On-Chip Integration of Acceleration, Pressure, and Temperature Composite Sensor With a Single-Sided Micromachining Technique 期刊论文
IEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2011, 卷号: 20, 期号: 1 Pages, 页码: 42-52
Wang, QA ,; Li, XX; Li, T; Bao, MH; Zhou, W ,
收藏  |  浏览/下载:13/0  |  提交时间:2012/05/12
Fast pore etching on high resistivity n-type silicon via photoelectrochemistry 期刊论文
CHINESE PHYSICS B, 2009, 卷号: 18, 期号: 2, 页码: 664-670
Bao, XQ; Ge, DH; Zhang, S; Li, JP; Zhou, P; Jiao, JW; Wang, YL
收藏  |  浏览/下载:9/0  |  提交时间:2011/12/17
Fast pore etching on high resistivity n-type silicon via photoelectrochemistry 期刊论文
CHINESE PHYSICS B, 2009, 卷号: 18, 期号: 2, 页码: 664-670
Bao, XQ; Ge, DH; Zhang, S; Li, JP; Zhou, P; Jiao, JW; Wang, YL
收藏  |  浏览/下载:15/0  |  提交时间:2011/12/17
On the origin of dissimilar pore evolution on patterned and unpatterned (100) n-type silicon 期刊论文
CHINESE SCIENCE BULLETIN, 2009, 卷号: 54, 期号: 7, 页码: 1143-1151
Bao, XQ; Ge, DH; Zhang, S; Zhao, L; Jiao, JW; Wang, YL
收藏  |  浏览/下载:9/0  |  提交时间:2011/12/17
Effects of the intrinsic layer width on the band-to-band tunneling current in p-i-n GaN-based avalanche photodiodes 期刊论文
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2009, 卷号: 24, 期号: 9 Article Number, 页码: 095006
Wang, L; Bao, XC; Zhang, WJ; Li, C; Yuan, YG; Xu, JT; Zhang, Y; Li, XY
收藏  |  浏览/下载:9/0  |  提交时间:2012/05/12
Fast pore etching on high resistivity n-type silicon via photoelectrochemistry 期刊论文
CHINESE PHYSICS B, 2009, 卷号: 18, 期号: 3 Pages, 页码: 664-670
Bao, XQ; Ge, DH; Zhang, S; Li, JP; Zhou, P; Jiao, JW; Wang, YL
收藏  |  浏览/下载:15/0  |  提交时间:2012/05/12
A NOVEL MONOLITHICALLY INTEGRATED PRESSURE, ACCELEROMETER AND TEMPERATURE COMPOSITE SENSOR 会议论文
Transducers’09:The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009
Quan Wang, Xinxin Li, Tie Li, Minhang Bao, Kun Zhang, Xiaohong Ge, Wei Zhou and Haifei Bao
收藏  |  浏览/下载:15/0  |  提交时间:2012/05/04


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