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Study of influence of the removal depth of the silicon modification layer on grating structures in reaction-sintered silicon carbide substrate and improvement method 期刊论文
Applied Optics, 2018, 卷号: 57, 期号: 34, 页码: F1-F7
作者:  Shen, C.;  Tan, X.;  Jiao, Q. B.;  Zhang, W.;  Wang, T. T.
收藏  |  浏览/下载:6/0  |  提交时间:2019/09/17
The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution 期刊论文
Ultrasonics Sonochemistry, 2018, 卷号: 40, 页码: 937-943
作者:  Jiao, Q. B.;  Zhu, C. L.;  Tan, X.;  Qi, X. D.;  Bayanheshig
收藏  |  浏览/下载:0/0  |  提交时间:2019/09/17
Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method 期刊论文
Optics Express, 2018, 卷号: 26, 期号: 19, 页码: 25381-25398
作者:  Shen, C.;  Tan, X.;  Jiao, Q. B.;  Zhang, W.;  Wu, N.
收藏  |  浏览/下载:3/0  |  提交时间:2019/09/17
Fabrication of high-efficiency and low-stray-light grating by inductively coupled plasma(ICP) etching-polishing method 期刊论文
Optics Express, 2016, 卷号: 24, 期号: 6
作者:  Tan, X.;  Q. B. Jiao;  X. D. Qi and H. Bayan
收藏  |  浏览/下载:14/0  |  提交时间:2017/09/11
Measuring method of diffraction efficiency for plane grating based on Fourier spectral technology 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 3
作者:  Ma, Z. Y.;  X. D. Qi;  X. T. Li;  S. W. Zhang;  Bayanheshig
收藏  |  浏览/下载:18/0  |  提交时间:2017/09/11


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