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Argon ion beam assisted magnetron sputtering deposition of boron-doped a-Si:H thin films with improved conductivity 期刊论文
Journal of Non-Crystalline Solids, 2013, 卷号: 378, 页码: 177-180
作者:  Wang LQ(王凌倩);  Wang, Weiyan;  Huang, Junjun;  Zeng, Yuheng;  Tan, Ruiqin
收藏  |  浏览/下载:19/0  |  提交时间:2015/10/19
Friction and Wear Properties of Graphite-Like Carbon Films Deposited on Different Substrates with a Different Interlayer Under High Hertzian Contact Stress 期刊论文
Tribology Letters, 2012, 卷号: 46, 期号: 3, 页码: 243-254
作者:  Wang YJ(王永军);  Li HX(李红轩);  Liu XH(刘晓红);  Ji L(吉利);  Wu YX(吴艳霞)
收藏  |  浏览/下载:11/0  |  提交时间:2013/07/12
Influence of substrate bias voltage on the microstructure and residual stress of CrN films deposited by medium frequency magnetron sputtering 期刊论文
Materials Science and Engineering B, 2011, 卷号: 176, 页码: 850-854
作者:  Ji L(吉利);  Li HX(李红轩);  Li HX(李红轩);  Zhou HD(周惠娣);  Chen JM(陈建敏)
收藏  |  浏览/下载:20/0  |  提交时间:2012/09/24
Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system 期刊论文
Journal of Non-Crystalline Solids, 2007, 卷号: 353, 页码: 136-142
作者:  Hao JY(郝俊英);  Xue QJ(薛群基);  Liu WM(刘维民)
收藏  |  浏览/下载:105/0  |  提交时间:2013/11/01


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