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Novel temperature sensor based on Fabry-Perot cavity structure and micro-mechanical bi-layered membranes 会议论文
20th Congress of the International-Commission-for-Optics, Changchun, PEOPLES R CHINA, 2005-08-21
作者:  Liu, YM;  Zhao, XQ;  Zhang, SJ
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/25
Mechanism and experiment study on photo-thermally excited bilayer silicon microcantilever resonators 会议论文
Conference on MEMS/MOEMS Technologies and Applications II, Beijing, PEOPLES R CHINA, 2004-11-10
作者:  Zhang, SJ;  Liu, YM
收藏  |  浏览/下载:2/0  |  提交时间:2019/12/25


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