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Fabrication of large-scale α-Si3N4 nanotubes on Si(1 1 1) by hot-wall chemical-vapor-deposition with the assistance of Ga 2O3 期刊论文
2004, 卷号: 229, 期号: 1-4, 页码: 9-12
作者:  Wei, Qinqin[1];  Xue, Chengshan[1];  Sun, Zhencui[1];  Zhuang, Huizhao[1];  Cao, Wentian[1]
收藏  |  浏览/下载:3/0  |  提交时间:2020/01/01
Fabrication of large-scale alpha-Si3N4 nanotubes on Si(111) by hot-wall chernical-vapor-deposition with the assistance of Ga2O3 期刊论文
2004, 卷号: 229, 期号: 1-4, 页码: 9-12
作者:  Wei, QQ;  Xue, CS;  Sun, ZC;  Zhuang, HZ;  Cao, WT
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/28


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