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CORC

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Effect of mechanical process parameters on friction behavior and material removal during sapphire chemical mechanical polishing 期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 9, 页码: 3020-3023
Zhang,ZF; Yan,WX; Zhang,L; Liu,WL; Song,ZT
收藏  |  浏览/下载：13/0  |  提交时间：2012/04/10
Effect of mechanical process parameters on friction behavior and material removal during sapphire chemical mechanical polishing 期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 9, 页码: 3020-3023
Zhang, ZF; Yan, WX; Zhang, L; Liu, WL; song, zt(重点实验室）
收藏  |  浏览/下载：14/0  |  提交时间：2013/05/10
Tribological Characterization of Several Silicon-Based Materials Under Ionic-Liquids Lubrication 期刊论文
TRIBOLOGY LETTERS, 2009, 卷号: 36, 期号: 3, 页码: 247-257
Xie, GX; Wang, Q; Si, LN; Liu, SH; Li, G
收藏  |  浏览/下载：12/0  |  提交时间：2012/03/24
Investigation of the running-in process and friction coefficient under the lubrication of ionic liquid/water mixture 期刊论文
APPLIED SURFACE SCIENCE, 2009, 卷号: 255, 期号: 11 Pages, 页码: 6408-6414
Xie, GX; Liu, SH; Guo, D; Wang, Q; Luo, JB
收藏  |  浏览/下载：14/0  |  提交时间：2012/05/12
Investigation of the running-in process and friction coefficient under the lubrication of ionic liquid/water mixture 期刊论文
APPLIED SURFACE SCIENCE, 2009, 卷号: 255, 期号: 12, 页码: 6408-6414
Xie, GX; Liu, SH; Guo, D; Wang, Q; Luo, JB
收藏  |  浏览/下载：15/0  |  提交时间：2012/03/24
A heater-integrated scanning probe microscopy probe array with different tip radii for study of micro-nanosize effects on silicon-tip/polymer-film friction 期刊论文
REVIEW OF SCIENTIFIC INSTRUMENTS, 2008, 卷号: 79, 期号: 2 Pages, 页码: 033701
Bao, HF; Li, XX
收藏  |  浏览/下载：10/0  |  提交时间：2012/05/12
A heater-integrated scanning probe microscopy probe array with different tip radii for study of micro-nanosize effects on silicon-tip/polymer-film friction 期刊论文
REVIEW OF SCIENTIFIC INSTRUMENTS, 2008, 卷号: 79, 期号: 3, 页码: 33701-33701
Bao, HF; Li, XX
收藏  |  浏览/下载：12/0  |  提交时间：2011/12/17
Micro/nano-friction and thermal - Mechanical properties of polymer thin-film investigated with an integrated spm probe array 期刊论文
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007, 页码: U153-U154
Bao, HF; Liu, B; Li, XX
收藏  |  浏览/下载：7/0  |  提交时间：2011/12/17
MICRO/NANO-FRICTION AND THERMAL-MECHANICAL PROPERTIES OF POLYMER THIN-FILM INVESTIGATED WITH AN INTEGRATED SPM PROBE ARRAY 会议论文
Transducers’07:The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, 2007
Haifei Bao, Bin Liu and Xinxin Li
收藏  |  浏览/下载：10/0  |  提交时间：2012/05/04
Friction and wear properties in MEMS 期刊论文
SENSORS AND ACTUATORS A-PHYSICAL, 2002, 卷号: Aug-97, 页码: 486-491
Wang, WY; Wang, YL; Bao, HF; Xiong, B; Bao, MH
收藏  |  浏览/下载：10/0  |  提交时间：2012/03/24

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