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Precise phase demodulation of single carrier-frequency interferogram by pixel-level Lissajous figure and ellipse fitting 期刊论文
SCIENTIFIC REPORTS, 2018, 卷号: 8, 页码: 148
作者:  Liu, Fengwei;  Wu, Yongqian;  Wu, Fan;  Koenig, Niels;  Schmitt, Robert
收藏  |  浏览/下载：32/0  |  提交时间：2019/08/23
Vector optical field generation based on birefringent phase plate 期刊论文
Optics Express, 2017, 卷号: 25, 期号: 11, 页码: 12531-12540
作者:  Wang, Jiazhou;  Cao, Axiu;  Pang, Hui;  Zhang, Man;  Wang, Guangyi
收藏  |  浏览/下载：36/0  |  提交时间：2018/11/20
Simultaneous extraction of phase and phase shift from two interferograms using Lissajous figure and ellipse fitting technology with Hilbert-Huang prefiltering 期刊论文
Journal of Optics (United Kingdom), 2016, 卷号: 18, 期号: 10, 页码: 105604
作者:  Liu, Fengwei;  Wang, Jing;  Wu, Yongqian;  Wu, Fan;  Trusiak, Maciej
收藏  |  浏览/下载：67/0  |  提交时间：2018/06/14
Four-quadrant gratings moire fringe alignment measurement in proximity lithography 期刊论文
OPTICS EXPRESS, 2013, 卷号: 21, 期号: 3, 页码: 3463-3473
作者:  Zhu, Jiangping;  Hu, Song;  Yu, Junsheng.;  Zhou, Shaolin;  Tang, Yan
收藏  |  浏览/下载：16/0  |  提交时间：2015/04/17
Single closed fringe pattern phase demodulation in alignment of nanolithography 期刊论文
OPTIK, 2013, 卷号: 124, 期号: 9, 页码: 818-823
作者:  Xu, Feng;  Hu, Song;  Yang, Yong;  Li, Jinlong;  Li, Lanlan
收藏  |  浏览/下载：17/0  |  提交时间：2015/04/17
Single closed fringe pattern phase demodulation in alignment of nanolithography 期刊论文
Optik, 2013, 卷号: 124, 期号: 9, 页码: 818-823
作者:  Xu, Feng;  Hu, Song;  Yang, Yong;  Li, Jinlong;  Li, Lanlan
收藏  |  浏览/下载：9/0  |  提交时间：2016/11/23
Four-quadrant gratings moiré fringe alignment measurement in proximity lithography 期刊论文
Optics Express, 2013, 卷号: 21, 期号: 3, 页码: 3463-3473
作者:  Zhu, Jiangping;  Hu, Song;  Yu, JunshenG.;  Zhou, Shaolin;  Tang, Yan
收藏  |  浏览/下载：13/0  |  提交时间：2016/11/23
A demodulation method for the circular carrier interferogram using phase stitching 期刊论文
OPTICS AND LASERS IN ENGINEERING, 2011, 卷号: 49, 期号: 9-10, 页码: 1118-1123
作者:  Li, Bo;  Chen, Lei;  Bian, Jiang;  Li, Yan
收藏  |  浏览/下载：13/0  |  提交时间：2015/09/21
Phase demodulation method for fringe pattern in alignment of nanometer lithography 会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, 2010
作者:  Feng Xu;  Song Hu;  Zhengquan Luo;  Shaolin Zhou
收藏  |  浏览/下载：10/0  |  提交时间：2016/11/24

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