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Deposition, microstructure and hardness of TiN/(Ti,Al)N multilayer films 期刊论文
International Journal of Refractory Metals & Hard Materials, 2012, 卷号: 32, 页码: 27-32
Y. H. Zhao; L. Hu; G. Q. Lin; J. Q. Xiao; C. Dong; B. H. Yu
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