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兰州大学 [10]
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专题:兰州大学
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Deposition and Growth Mechanism of Low-Temperature Crystalline Silicon Films on Inexpensive Substrates
会议论文
Korea-China Symposium on Advanced Functional Films for Information, Incheon, SOUTH KOREA, SEP 28-OCT 02, 2008
作者:
He, DY
;
Yin, M
;
Wang, JX
;
Gao, PQ
;
Li, JS
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2015/07/31
Low-temperature crystalline Si films
Inductively coupled plasma CVD
Al-induced crystallization growth
Inexpensive substrates
Low-temperature deposition of highly crystallized silicon films on Al-coated polyethylene napthalate by inductively coupled plasma CVD
期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, 2009, 卷号: 481, 期号: 1-2, 页码: 278-282
作者:
Wang, JX
;
Gao, PQ
;
Yin, M
;
Qin, YL
;
Yan, HQ
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2015/05/25
Crystalline silicon films
PEN substrates
Al layer
Raman spectroscopy
Scanning electron microscope
Inductively coupled plasma CVD
Regulation of the plasma membrane during exposure to low temperatures in suspension-cultured cells from a cryophyte (Chorispora bungeana)
期刊论文
PROTOPLASMA, 2008, 卷号: 232, 期号: 3-4, 页码: 173-181
作者:
Shi, YL
;
An, LZ
;
Zhang, MX
;
Huang, CH
;
Zhang, H
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2015/12/14
Chorispora bungeana
low temperature
plasma membrane
plasma membrane H+-ATPase
plasma membrane NADH oxidase
Structure and optical properties of Si films deposited by inductively coupled plasma CVD at room temperature
会议论文
作者:
Xiaoqiang, Wang
;
Deyan, He
;
Junshuai, Li
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2017/01/20
Thin films
Characterization
Chemical vapor deposition
Inductively coupled plasma
Nanocrystalline materials
Optical band gaps
Silanes
Silicon
Crystalline silicon films
Low-temperature growth
Silane concentration
Effect of H-2 on polycrystalline si films deposited by plasma-enhanced CVD using ar-diluted SiH4
期刊论文
ACTA PHYSICA SINICA/物理学报, 2006, 卷号: 55, 期号: 11, 页码: 5959-5963
作者:
Qi, J
;
Jin, J
;
Hu, HL
;
Gao, PQ
;
Yuan, BH
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/05/25
low-temperature polycrystalline Si film
PECVD
Ar-diluted SiH4
H-2 flow
Electron field emission from nano-crystalline Si films deposited by inductively coupled plasma CVD at room temperature
期刊论文
CHINESE SCIENCE BULLETIN, 2006, 卷号: 51, 期号: 5, 页码: 510-514
-
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  |  
浏览/下载:2/0
  |  
提交时间:2015/05/25
ICP-CVD
nano-scale Si tips
electron field emission
low-temperature growth
Al-induced crystallization during low-temperature deposition of Si films by inductively coupled plasma CVD
会议论文
11th China-Korea Symposium on Thin Film Materials, Chengdu, PEOPLES R CHINA, JUN 28-JUL 05, 2004
作者:
He, DY
;
Wang, XQ
;
Chen, Q
;
Li, JS
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  |  
浏览/下载:2/0
  |  
提交时间:2015/07/31
inductively coupled plasma CVD
Al-induced crystallization growth
low-temperature poly-Si films
Al诱导a-Si:H薄膜的晶化
期刊论文
真空科学与技术学报/Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2005, 卷号: 25, 期号: 1, 页码: 57-60
作者:
祁菁
;
金晶
;
胡海龙
;
贺德衍
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/04/27
等离子体化学气相沉积
Al诱导晶化
氢化非晶Si薄膜
低温多晶Si薄膜
Al effect
Hydrogenated amorphous silicon films
Low temperature polycrystalline silicon films
Aluminum-induced crystallization during deposition of silicon films by inductively coupled plasma CVD
期刊论文
ACTA PHYSICA SINICA/物理学报, 2005, 卷号: 54, 期号: 1, 页码: 269-273
作者:
Wang, XQ
;
Li, JS
;
Chen, Q
;
Qi, J
;
Yin, M
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2015/05/25
ICP-CVD
Al-induced crystallization
Si thin films
low-temperature growth
Preparation and characterization of high-quality TiN films at low temperature by filtered cathode arc plasma
期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 卷号: 22, 期号: 6, 页码: 2419-2423
-
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2015/05/25
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