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科研机构
北京大学 [28]
内容类型
期刊论文 [17]
其他 [11]
发表日期
2017 [1]
2014 [4]
2013 [4]
2012 [2]
2011 [2]
2010 [1]
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共28条,第1-10条
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专题:北京大学
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Alternative method to fabricate microdevices on a freestanding Si3N4 window
期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2017
Wang, Zhenhai
;
Yang, Fan
;
Han, Danhong
;
Li, Gang
;
Xu, Jingjing
;
Xu, Shengyong
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2017/12/03
SILICON-NITRIDE FILMS
THERMAL-CONDUCTIVITY
THIN-FILMS
RESIST
MICROSCOPY
TRANSPORT
QUANTUM
DESIGN
GAS
A platform for in-situ multi-probe electronic measurements and modification of nanodevices inside a transmission electron microscope
期刊论文
nanotechnology, 2014
Xu, T. T.
;
Ning, Z. Y.
;
Shi, T. W.
;
Fu, M. Q.
;
Wang, J. Y.
;
Chen, Q.
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/10
in-situ TEM
nanodevice
structure characterization
electronic measurement
nanomanipulation
FIELD-EFFECT TRANSISTORS
CARBON NANOTUBE
ELECTROCHEMICAL LITHIATION
MECHANICAL-PROPERTIES
NANOWIRES
FABRICATION
GRAPHENE
EMISSION
CONTACTS
TEM
Switchable wetting and flexible SiC thin film with nanostructures for microfluidic surface-enhanced Raman scattering sensors
期刊论文
sensors and actuators a physical, 2014
Zhang, Xiao-Sheng
;
Meng, Bo
;
Zhu, Fu-Yun
;
Tang, Wei
;
Zhang, Hai-Xia
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2015/11/10
Silicon carbide
Switchable wettability
Flexible materials
SERS
Deep reactive ion etching
DUAL-SCALE STRUCTURES
SILICON-CARBIDE
STRUCTURES FABRICATION
PRESSURE SENSOR
SUPERHYDROPHOBICITY
MEMS
SUPERHYDROPHILICITY
TECHNOLOGY
Preparation of silicon nanowires by in situ doping and their electrical properties
期刊论文
colloids and surfaces a physicochemical and engineering aspects, 2014
Wang, Jindong
;
He, Gen
;
Qin, Jinwen
;
Li, Lidong
;
Guo, Xuefeng
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/11
Nanowire
Silicon
AFM
Wet chemical etch
Electrical measurement
Dopant
DOPANT DISTRIBUTION
SINGLE
DEVICES
MOSFETS
GROWTH
TMAH
Normally-Off Hybrid Al2O3/GaN MOSFET on Silicon Substrate Based on Wet-Etching
其他
2014-01-01
Wang, Maojun
;
Wang, Ye
;
Zhang, Chuan
;
Wen, Cheng P.
;
Wang, Jinyan
;
Hao, Yilong
;
Wu, Wengang
;
Shen, Bo
;
Chen, Kevin J.
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2015/11/13
PERFORMANCE
SI
A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices
期刊论文
science china technological sciences, 2013
Yang ZhenChuan
;
Wei YuMin
;
Mao Xu
;
Yan GuiZhen
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/10
SOI
dry release
lag effect
accelerometer
footing effect
WAFER
Top-Down Fabricated Silicon-Nanowire-Based Field-Effect Transistor Device on a (111) Silicon Wafer
期刊论文
small, 2013
Yu, Xiao
;
Wang, Yuchen
;
Zhou, Hong
;
Liu, Yanxiang
;
Wang, Yi
;
Li, Tie
;
Wang, Yuelin
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2015/11/11
field-effect transistors
nanowires
silicon
top-down process
wafers
NANOTUBE
Switchable wetting & flexible SiC thin film with nanostructures
其他
2013-01-01
Zhang, X.S.
;
Meng, B.
;
Zhu, F.Y.
;
Tang, W.
;
Zhang, H.X.
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/13
A single-walled carbon nanotube thin film solar microcell with V-groove array structure
期刊论文
2013
Chang, Yiyang
;
Liu, Peng
;
Zhang, Jinwen
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2015/11/13
Metallization introduced corrosion and parylene protection of surface micromachined polysilicon film with submicron capacitive gap
期刊论文
微电子工程, 2012
Zhang, Yiming
;
Wang, Yunda
;
Cai, Ming
;
Wang, Ying
;
Hao, Yilong
;
Chen, Jing
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/10
MEMS
Polysilicon corrosion
HF release
Parylene
POROUS SILICON FORMATION
GALVANIC CORROSION
MEMS
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