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High performance fluoride optical coatings for DUV optics 会议论文
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, AOMATT 2014, April 26, 2014 - April 29, 2014, Harbin, China
Zhang L.; Cai X.
收藏  |  浏览/下载:14/0  |  提交时间:2015/04/27
Fabrication fluoride high reflection mirror by thermal evaporation in the ArF excimer laser 会议论文
Asia Pacific Conference on Optics Manufacture 2012, APCOM 2012, August 26, 2012 - August 28, 2012, Changchun, China
作者:  Li C.
收藏  |  浏览/下载:13/0  |  提交时间:2014/05/15
Nanoscale patterns made by using a 13.5-nm Schwarzschild objective and a laser produced plasma source (EI CONFERENCE) 会议论文
Optical Micro- and Nanometrology IV, April 16, 2012 - April 18, 2012, Brussels, Belgium
Wang Z.; Wang X.; Mu B.; Bai Y.
收藏  |  浏览/下载:29/0  |  提交时间:2013/03/25
Lithium fluoride (LiF) crystal is a very promising candidate as nanometer resolution EUV and soft X-ray detector. Compared with other EUV and soft X-ray detectors  charge coupled device and photographic films  LiF crystal has high resolution  large field of view and wide dynamic range. In this paper  using LiF crystal as EUV detector and a Schwarzschild objective (SO) working at 13.5nm as projection optics  mesh images with 4.2 m  1.2 m and 800 nm line width and pinhole patterns with 1.5m diameter are acquired in projection imaging mode and direct writing mode  respectively. Fluorescence intensity profiles of images show that the resolution of mesh image is 900 nm  and the one of pinhole image is 800 nm. In the experiments  a spherical condense mirror based on normal incidence type is used to eliminate the damage and contamination on the masks (mesh and pinhole) caused by the laser plasma  and the energy density is not decreased compared with that the masks are close to the plasma. The development of the SO  the alignment of the objective and the imaging experiments are also reported. 2012 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).  
Energy Transition between Yb(3+)-Tm(3+)-Gd(3+) in Gd(3+), Yb(3+) and Tm(3+) Co-doped Fluoride Nanocrystals 会议论文
2011
Zhang J. S.; Cao C. Y.; Lu S. Z.; Qin W. P.
收藏  |  浏览/下载:19/0  |  提交时间:2013/03/28
Energy transition between Yb3+-Tm3+-Gd3+ in Gd3+, Yb3+ and Tm3+ Co-doped fluoride nanocrystals (EI CONFERENCE) 会议论文
17th International Conference on Dynamical Processes in Excited States of Solids, DPC'10, June 20, 2010 - June 25, 2010, Argonne, IL, United states
Zhang J.; Cao C.; Lu S.; Qin W.-P.
收藏  |  浏览/下载:15/0  |  提交时间:2013/03/25


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