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长春光学精密机械与物... [1]
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会议论文 [1]
发表日期
2006 [1]
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Photonic micro and sub-micro structures in LiNbO3 crystals (EI CONFERENCE)
会议论文
ICO20: Materials and Nanostructures, August 21, 2005 - August 26, 2005, Changchun, China
Wang P.
;
Bentini G. G.
;
Bianconi M.
;
Cerutti A.
;
Chiarini M.
;
Mazzoldi P.
;
Pennestri G.
;
Sada C.
;
She L.
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浏览/下载:16/0
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提交时间:2013/03/25
High energy lasers processing of materials is knowing an increasing interest since it not only can make manufacturing faster
cleaner
and more accurate but also because it opens up entirely new technologies and manufacturing methods
that are simply not available by using standard techniques. In this paper
an experimental set-up
based on pulsed KrF excimer Laser
assembled for surface patterning of mono and two-dimensional
(1D-2D)
micro and submicro structures on LiNbO3(LN) crystal
will be described in detail. The apparatus has been used to produce photonic structures in LN
both by patterning of PMMA photoresist
and by direct surface patterning through laser ablation or direct laser writing. The structures and properties of the photonic crystals fabricated by using this apparatus have been investigated
and the preliminary results will be presented.
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