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Photonic micro and sub-micro structures in LiNbO3 crystals (EI CONFERENCE) 会议论文
ICO20: Materials and Nanostructures, August 21, 2005 - August 26, 2005, Changchun, China
Wang P.; Bentini G. G.; Bianconi M.; Cerutti A.; Chiarini M.; Mazzoldi P.; Pennestri G.; Sada C.; She L.
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High energy lasers processing of materials is knowing an increasing interest since it not only can make manufacturing faster  cleaner  and more accurate but also because it opens up entirely new technologies and manufacturing methods  that are simply not available by using standard techniques. In this paper  an experimental set-up  based on pulsed KrF excimer Laser  assembled for surface patterning of mono and two-dimensional  (1D-2D)  micro and submicro structures on LiNbO3(LN) crystal  will be described in detail. The apparatus has been used to produce photonic structures in LN  both by patterning of PMMA photoresist  and by direct surface patterning through laser ablation or direct laser writing. The structures and properties of the photonic crystals fabricated by using this apparatus have been investigated  and the preliminary results will be presented.  


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