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Effect of oxygen flow rate on electrical and optical properties of ATO thin films prepared by rf magnetron sputtering 会议论文
5th International Symposium on Advance Ceramics (ISAC) / 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials (ASPT), Wuhan, PEOPLES R CHINA, DEC 09-12, 2013
作者:  Yang, P.*;  Jiang, L.R.;  Wu, J.Y.;  Chen, F.;  Perez, J.A. Galaviz
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