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浏览/检索结果: 共1条，第1-1条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Simulation and experiment of the static FTIR based on micro multi-step mirrors (EI CONFERENCE) 会议论文 International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China Liang J.; Liang Z.-Z.; Lv J.-G.; Fu J.-G.; Zheng Y.; Feng C.; Wang W.-B.; Zhu W.-B.; Yao J.-S.; Zhang J. 收藏  |  浏览/下载：25/0  |  提交时间：2013/03/25 In recent years  Fourier transform spectrometer (FTS) with small size and low mass is required in many applications with growing need for real-time and small platform spectral detection. In this paper  a micro Fourier transform infrared spectrometer (FTIR) based on spatial modulation mode was designed. This spectrometer has the advantages of high stability and simplified configuration. It also promises optical path differences (OPD) with high precision  as MOEMS technology is used in manufacturing the key components. The simulation and the experiments with regard to this FTIR configuration have been done. Firstly  the diffraction effect of the micro multi-step mirrors (MMSMs) is studied. We discuss the influence to the reversed spectrum by different mirror widths and different diffraction distances. Secondly  we simulate and analyze the influence of the source solid angle to the spectral resolution. Thirdly  we set up the theoretical model of the collimation error which is mainly from the defocus of the optical system and analyze the result caused by the collimation error. Fourthly  a new discrete Fourier transform arithmetic using least-squares cosines progression (LSCP) is proposed which can reconstruct the spectrum with nonuniform sampled signals. Finally  the MMSMs are fabricated used the MOEMS technology and the structural parameters are tested. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).