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长春光学精密机械与物... [1]
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会议论文 [1]
发表日期
2010 [1]
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Design of co-path scanning long trace profiler for measurement of X-ray space optical elements (EI CONFERENCE)
会议论文
6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China
Shun L.
;
Yan G.
;
Wei Z.
;
Yang Z.
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提交时间:2013/03/25
The Long Trace Profiler (LTP) is a precision surface slope error measurement instrument used in synchrotron radiation optics for many years. By making some modifications to the LTP system
we developed a co-path scanning LTP (CSLTP) system to test the cylindrical aspherical surface which used in X-ray space optics. To reduce the mistake caused by air turbulence and manufacture faults of optical elements used
the CSLTP is designed with the least difference between the testing beam path and the reference beam path. Also
it uses multiple-beam interference but double beam interference to reduce the width of beam fringe. This improves the position precision of the beam fringe on the image plane. 2010 SPIE.
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