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Scheduling a Single-Arm Multi-Cluster Tool With a Condition-Based Cleaning Operation
期刊论文
IEEE/CAA Journal of Automatica Sinica, 2023, 卷号: 10, 期号: 10, 页码: 1965-1983
作者:
Qinghua Zhu
;
Hongpeng Li
;
Cong Wang
;
Yan Hou
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2023/09/07
Chamber cleaning
multi-cluster tools
scheduling
semiconductor manufacturing
Fabrication of ultra-high aspect ratio silicon grating using an alignment method based on a scanning beam interference lithography system
期刊论文
Optics Express, 2022, 卷号: 30, 期号: 22, 页码: 40842-40853
作者:
X. S. Chen
;
S. Jiang
;
Y. B. Li
;
Y. X. Jiang
;
W. Wang and Bayanheshig
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  |  
浏览/下载:0/0
  |  
提交时间:2023/06/14
Highly Textured Assembly of Engineered Si Nanowires for Artificial Synapses Model
期刊论文
ACS APPLIED ELECTRONIC MATERIALS, 2021, 卷号: 3, 期号: 3, 页码: 1375-1383
作者:
Duan, Chunyang
;
Zhao, Dong
;
Wang, Xiang
;
Ren, Bei
;
Li, Mengqi
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  |  
浏览/下载:23/0
  |  
提交时间:2021/08/31
Si nanowires
HiGee technology
assembly
graphene quantum dots
artificial synapses
Improvement of GaN plasma etching uniformity by optimizing the coil electrode with plasma simulation and experimental validation
期刊论文
SURFACE & COATINGS TECHNOLOGY, 2020, 卷号: 400
作者:
Xiao, Dezhi
;
Ruan, Qingdong
;
Liu, Liangliang
;
Shen, Jie
;
Cheng, Cheng
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  |  
浏览/下载:22/0
  |  
提交时间:2020/11/26
GaN
Plasma etching
Inductively-coupled plasma
Field coupling
Uniformity
Plasma simulation
Measurement of Wafer Focus by Grating Shearing Interferometry
期刊论文
Applied Sciences-Basel, 2020, 卷号: 10, 期号: 3, 页码: 10217467-1-8
作者:
Wang, Jian
;
Hu, Song
;
Zhu, Xianchang
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  |  
浏览/下载:6/0
  |  
提交时间:2021/05/11
Focusing
Grating
Shearing Interferometry
Lithography
Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors
期刊论文
MATERIALS LETTERS, 2020, 卷号: 273, 页码: 4
作者:
Wang, Y.
;
Tong, W. G.
;
Han, N.
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  |  
浏览/下载:2/0
  |  
提交时间:2020/07/23
Pd/SnO2
NiO thin films
Composite materials
Sputtering
Ethanol gas detection
XPS
MEMS gas sensor
Fabrication and Piezoresistive/Piezoelectric Sensing Characteristics of Carbon Nanotube/PVA/Nano-ZnO Flexible Composite
期刊论文
SCIENTIFIC REPORTS, 2020, 卷号: 10, 期号: 1, 页码: 12
作者:
Chen, Shuaichao
;
Luo, Jianlin
;
Wang, Xiaoli
;
Li, Qiuyi
;
Zhou, Liucong
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  |  
浏览/下载:24/0
  |  
提交时间:2020/07/23
Vertical Chemical Vapor Deposition Growth of Highly Uniform 2D Transition Metal Dichalcogenides
期刊论文
ACS NANO, 2020, 卷号: 14, 期号: 4, 页码: 4646-4653
作者:
Tang, Lei
;
Li, Tao
;
Luo, Yuting
;
Feng, Simin
;
Cai, Zhengyang
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  |  
浏览/下载:47/0
  |  
提交时间:2021/02/02
two-dimensional materials
TMDCs
gaseous sources
VCVD
uniformity
heterostructures
Performance evaluation and prediction of the integrated circuit industry in China: A hybrid method
期刊论文
SOCIO-ECONOMIC PLANNING SCIENCES, 2020, 卷号: 69, 页码: 12
作者:
Zhou, Xiaoyang
;
Chen, Hao
;
Chai, Jian
;
Wang, Shouyang
;
Lev, Benjamin
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2020/05/24
Dynamic DEA
Projection analysis
Grey model
Integrated circuit industry
Design and fabrication of 1×N polarization-insensitive beam splitters based on 2D subwavelength gratings
期刊论文
Optics Communications, 2020, 卷号: 456
作者:
Wu, Gang
;
Huang, Yongqing
;
Duan, Xiaofeng
;
Liu, Kai
;
Ma, Xiaokai
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  |  
浏览/下载:5/0
  |  
提交时间:2020/11/14
Fabrication
Optical beam splitters
Optical instruments
Polarization
Silicon on insulator technology
Silicon wafers
Wavefronts
Beam splitter
High index contrast
Phase contral
Polarization sensitivity
Polarization-insensitive
Silicon on insulator wafers
Sub-wave length grating
The rigorous coupledwave analyses (RCWA)
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