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长春光学精密机械与物... [1]
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会议论文 [1]
发表日期
2010 [1]
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Analysis of measuring errors for the visible light phase-shifting point diffraction interferometer (EI CONFERENCE)
会议论文
2010 OSA-IEEE-COS Advances in Optoelectronics and Micro/Nano-Optics, AOM 2010, December 3, 2010 - December 6, 2010, Guangzhou, China
Zhang Y.
;
Jin C.
;
Lu Z.
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提交时间:2013/03/25
In order to improve the measuring accuracy of the visible light phase-shifting point diffraction interferometer (PS/PDI) for the extreme ultraviolet lithography (EUVL) aspheric mirrors
the main measuring errors will be discussed in this paper. At first
the elementary configuration and measuring principle of the visible light phase-shifting point diffraction interferometer are introduced briefly
then the different errors which are possible to affect the measuring result are summed up
the errors include PZT phase-shifting error
detector nonlinearity error
detector quantization error
wavelength instability error and intensity instability error of the laser source
vibration error
air refractivity instability error and so on. Through detailed analysis and simulation
the magnitude of these errors can be obtained. By analysing the reasons which cause these errors and the relationship between these errors and interferometer configuration parameters
some methods are put forward to avoid or restrain these errors accordingly.
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