×
验证码:
换一张
忘记密码?
记住我
CORC
首页
科研机构
检索
知识图谱
申请加入
托管服务
登录
注册
在结果中检索
科研机构
西北高原生物研究所 [20]
厦门大学 [19]
沈阳自动化研究所 [18]
半导体研究所 [16]
大连化学物理研究所 [12]
化学研究所 [7]
更多...
内容类型
期刊论文 [152]
会议论文 [9]
学位论文 [7]
专利 [3]
其他 [3]
发表日期
2020 [6]
2019 [3]
2018 [10]
2017 [7]
2016 [4]
2015 [6]
更多...
学科主题
半导体物理 [6]
天文和天体物理 [6]
半导体材料 [5]
光电子学 [3]
物理化学与绿色催化 [2]
生物科学 [2]
更多...
×
知识图谱
CORC
开始提交
已提交作品
待认领作品
已认领作品
未提交全文
收藏管理
QQ客服
官方微博
反馈留言
浏览/检索结果:
共174条,第1-10条
帮助
已选(
0
)
清除
条数/页:
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
排序方式:
请选择
作者升序
作者降序
题名升序
题名降序
发表日期升序
发表日期降序
提交时间升序
提交时间降序
Scheduling a Single-Arm Multi-Cluster Tool With a Condition-Based Cleaning Operation
期刊论文
IEEE/CAA Journal of Automatica Sinica, 2023, 卷号: 10, 期号: 10, 页码: 1965-1983
作者:
Qinghua Zhu
;
Hongpeng Li
;
Cong Wang
;
Yan Hou
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2023/09/07
Chamber cleaning
multi-cluster tools
scheduling
semiconductor manufacturing
Tunable dual-wavelength semiconductor laser based on indium-rich cluster quantum structure
期刊论文
Journal of Infrared and Millimeter Waves, 2022, 卷号: 41, 期号: 3, 页码: 540-544
作者:
X. Li
;
H. X. Tai
;
Y. H. Wang
;
M. Zheng
;
J. W. Zhang
收藏
  |  
浏览/下载:0/0
  |  
提交时间:2023/06/14
Performance and local structure evolution of NbMoTaWV entropy-stabilized oxide thin films with variable oxygen content
期刊论文
Surface and Coatings Technology, 2020, 卷号: 402
作者:
Bi, Linxia
;
Li, Xiaona
;
Li, Zhumin
;
Hu, Yinglin
;
Zhang, Junyi
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2020/11/14
Crystal atomic structure
Entropy
Film preparation
Hardness
Magnetic semiconductors
Magnetron sputtering
Molybdenum alloys
Niobium alloys
Oxide minerals
Oxide semiconductors
Oxygen
Refractory metals
Silicon wafers
Single crystals
Tantalum alloys
Thin films
Titanium dioxide
Tungsten alloys
Vanadium alloys
Amorphous oxide semiconductor (AOS)
Application prospect
Conductive mechanisms
Metal oxide thin films
Radio frequency magnetron sputtering
Room-temperature resistivity
Temperature behavior
Wide temperature ranges
Performance and local structure evolution of NbMoTaWV entropy-stabilized oxide thin films with variable oxygen content
期刊论文
Surface and Coatings Technology, 2020, 卷号: 402
作者:
Bi, Linxia
;
Li, Xiaona
;
Li, Zhumin
;
Hu, Yinglin
;
Zhang, Junyi
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2022/02/17
Crystal atomic structure
Entropy
Film preparation
Hardness
Magnetic semiconductors
Magnetron sputtering
Molybdenum alloys
Niobium alloys
Oxide minerals
Oxide semiconductors
Oxygen
Refractory metals
Silicon wafers
Single crystals
Tantalum alloys
Thin films
Titanium dioxide
Tungsten alloys
Vanadium alloys
Amorphous oxide semiconductor (AOS)
Application prospect
Conductive mechanisms
Metal oxide thin films
Radio frequency magnetron sputtering
Room-temperature resistivity
Temperature behavior
Wide temperature ranges
Influence of deposition temperature on the structure, optical and electrical properties of a-C films by DCMS
期刊论文
APPLIED SURFACE SCIENCE, 2020, 卷号: 503
作者:
Li, Hao
;
Guo, Peng
;
Zhang, Dong
;
Chen, Rende
;
Zuo, Xiao
收藏
  |  
浏览/下载:106/0
  |  
提交时间:2020/12/16
DIAMOND-LIKE-CARBON
AMORPHOUS-CARBON
SUBSTRATE-TEMPERATURE
THIN-FILMS
GROWTH
SPECTROSCOPY
SP(3)
TAUC
GAP
ARC
Scheduling Dual-Arm Cluster Tools With Multiple Wafer Types and Residency Time Constraints
期刊论文
IEEE/CAA Journal of Automatica Sinica, 2020, 卷号: 7, 期号: 3, 页码: 776-789
作者:
Jipeng Wang
;
Hesuan Hu
;
Chunrong Pan
;
Yuan Zhou
;
Liang Li
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2021/03/11
Cluster tools
multiple wafer types
scheduling
semiconductor manufacturing
wafer fabrication
Post-Processing Time-Aware Optimal Scheduling of Single Robotic Cluster Tools
期刊论文
IEEE/CAA Journal of Automatica Sinica, 2020, 卷号: 7, 期号: 2, 页码: 597-605
作者:
QingHua Zhu
;
Yan Qiao
;
NaiQi Wu
;
Yan Hou
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2021/03/11
Cluster tool
discrete event systems
optimization
robotic systems
scheduling
Ultrabroadband and independent polarization of optical amplification with InGaAs-based indium-rich cluster quantum-confined structure
期刊论文
Applied Physics Letters, 2020, 卷号: 116, 期号: 25, 页码: 5
作者:
M. Zheng
;
Q. N. Yu
;
X. Li
;
H. X. Tai
;
X. Zhang
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2021/07/06
Heavy ion-induced single event effects in active pixel sensor array
期刊论文
SOLID-STATE ELECTRONICS, 2019, 卷号: 152, 期号: 2, 页码: 93-99
作者:
Cai, YL (Cai, Yu-Long)[ 1,2,3 ]
;
Guo, Q (Guo, Qi)[ 1,2 ]
;
Li, YD (Li, Yu-Dong)[ 1,2 ]
;
Wen, L (Wen, Lin)[ 1,2 ]
;
Zhou, D (Zhou, Dong)[ 1,2 ]
收藏
  |  
浏览/下载:129/0
  |  
提交时间:2019/01/03
CMOS active pixel sensor (APS)
SEE
Heavy ion
Grouping Method of Semiconductor Bonding Equipment Based on Clustering by Fast Search and Find of Density Peaks for Dynamic Matching According to Processing Tasks
期刊论文
PROCESSES, 2019, 卷号: 7, 期号: 9, 页码: 1-24
作者:
Qiao, Feng
;
Gao ZJ(高治军)
;
Si W(司雯)
;
Han ZH(韩忠华)
;
Peng, Jiayu
收藏
  |  
浏览/下载:53/0
  |  
提交时间:2019/11/13
semiconductor bonding equipment-grouping method
graph theory
association matrix
CFSFDP algorithm
©版权所有 ©2017 CSpace - Powered by
CSpace