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Nano-Focusing and Leveling System Based on Improved Phase Analysis 期刊论文
IEEE Photonics Journal, 2016, 卷号: 8, 期号: 2, 页码: 7445932
作者:  Tang, Yan;  He, Yu;  Yang, Yong;  Wang, Jian;  Liu, Junbo
收藏  |  浏览/下载：15/0  |  提交时间：2018/06/14
A Moire-Based Four-Channel Focusing and Leveling Scheme for Projection Lithography 期刊论文
IEEE PHOTONICS JOURNAL, 2014, 卷号: 6, 期号: 4
作者:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Li, Yanli;  Yin, Didi
收藏  |  浏览/下载：24/0  |  提交时间：2015/07/10
A moiré-based four-channel focusing and leveling scheme for projection lithography 期刊论文
IEEE Photonics Journal, 2014, 卷号: 6, 期号: 4, 页码: 6842663
作者:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Li, Yanli;  Yin, Didi
收藏  |  浏览/下载：14/0  |  提交时间：2016/11/23
Technology of focus detection for 193nm projection lithographic tool 会议论文
Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012
作者:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Xu, Feng;  Li, Jinglong
收藏  |  浏览/下载：8/0  |  提交时间：2016/11/24
Moire-based focusing and leveling scheme for optical projection lithography 期刊论文
APPLIED OPTICS, 2010, 卷号: 49, 期号: 31, 页码: 5959-5963
作者:  Yan, Wei;  Yang, Yong;  Chen, Wangfu;  Hu, Song;  Zhou, Shaolin
收藏  |  浏览/下载：16/0  |  提交时间：2015/09/21
Focusing and leveling in dual stage lithographic system 会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, 2010
作者:  Jinlong Li;  Lixin Zhao;  Song Hu;  Shaolin Zhou
收藏  |  浏览/下载：14/0  |  提交时间：2016/11/24
An optical modulation based focus method for optical projection lithography 会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, 2010
作者:  Wangfu Chen;  Song Hu
收藏  |  浏览/下载：12/0  |  提交时间：2016/11/24
Moire-based focusing and leveling scheme for optical projection lithography 期刊论文
Applied Optics, 2010, 卷号: 49, 期号: 31
作者:  Yan Wei;  Yang Yong;  Chen Wangfu;  Hu Song;  Zhou Shaolin
收藏  |  浏览/下载：7/0  |  提交时间：2016/11/23
Study on laser direct writing system for 32nm node 会议论文
Proceedings of SPIE, 2009
作者:  Jiang Wenbo;  Hu Song;  Yang Yong;  Zhao Lixin;  Yan WEi
收藏  |  浏览/下载：12/0  |  提交时间：2016/11/24
In situ surface topography measurement method of granite base in scanning wafer stage with laser interferometer 期刊论文
optik, 2008, 卷号: 119, 期号: 1, 页码: 1, 6
He Le; 王向朝; Shi Weijie
收藏  |  浏览/下载：918/143  |  提交时间：2009/09/18

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