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Research on High Precision Locating of Laser Spot Center in Free-Space Laser Communication System 会议论文
Xi'an, China, 2021-10-15
作者:  Meng, Xiangsheng;  Ma, Caiwen;  Tian, Yan;  Han, Junfeng;  Liang, Dongsheng
收藏  |  浏览/下载:19/0  |  提交时间:2021/12/06
光栅剪切干涉波前测量技术研究 学位论文
博士: 中国科学院上海光学精密机械研究所, 2016
作者:  李杰
收藏  |  浏览/下载:209/0  |  提交时间:2016/11/28
光刻投影物镜波像差原位干涉检测技术研究 学位论文
硕士: 中国科学院上海光学精密机械研究所, 2015
作者:  吴飞斌
收藏  |  浏览/下载:80/0  |  提交时间:2016/11/28
Ronchi相移剪切干涉仪及其相位提取误差分析 期刊论文
光学学报, 2015, 卷号: 35, 期号: 6, 页码: 612004
作者:  吴飞斌;  唐锋;  王向朝;  李杰;  李永
收藏  |  浏览/下载:18/0  |  提交时间:2016/11/28
Analysis of measuring errors for the visible light phase-shifting point diffraction interferometer (EI CONFERENCE) 会议论文
2010 OSA-IEEE-COS Advances in Optoelectronics and Micro/Nano-Optics, AOM 2010, December 3, 2010 - December 6, 2010, Guangzhou, China
Zhang Y.; Jin C.; Lu Z.
收藏  |  浏览/下载:8/0  |  提交时间:2013/03/25
In order to improve the measuring accuracy of the visible light phase-shifting point diffraction interferometer (PS/PDI) for the extreme ultraviolet lithography (EUVL) aspheric mirrors  the main measuring errors will be discussed in this paper. At first  the elementary configuration and measuring principle of the visible light phase-shifting point diffraction interferometer are introduced briefly  then the different errors which are possible to affect the measuring result are summed up  the errors include PZT phase-shifting error  detector nonlinearity error  detector quantization error  wavelength instability error and intensity instability error of the laser source  vibration error  air refractivity instability error and so on. Through detailed analysis and simulation  the magnitude of these errors can be obtained. By analysing the reasons which cause these errors and the relationship between these errors and interferometer configuration parameters  some methods are put forward to avoid or restrain these errors accordingly.  
消除正弦相位调制干涉仪中光强调制影响的全光纤干涉仪 期刊论文
中国激光, 2007, 卷号: 34, 期号: 9, 页码: 1267, 1270
李中梁; 王向朝; 刘英明; 步扬
收藏  |  浏览/下载:1034/189  |  提交时间:2009/09/18


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