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Benchmarking Process Integration and Layout Decomposition of Directed Self-Assembly and Self-Aligned Multiple Patterning Techniques (CPCI-S收录) 会议论文
DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY VIII
作者:  Chen, Yijian[1];  Zhou, Jun[1];  You, Jun[1];  Liu, Hongyi[1]
收藏  |  浏览/下载:3/0  |  提交时间:2019/04/12
SRAM Circuit Performance in the Presence of Process Variability of Self-aligned Multiple Patterning (CPCI-S收录) 会议论文
DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION VII
作者:  Xiao, Wei[1];  Cheng, Qi[1];  Chen, Yijian[1]
收藏  |  浏览/下载:6/0  |  提交时间:2019/04/15
Mask Strategy and Layout Decomposition for Self-Aligned Quadruple Patterning (CPCI-S收录) 会议论文
DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION VII
作者:  Kang, Weiling[1];  Feng, Chen;  Chen, Yijian[1]
收藏  |  浏览/下载:2/0  |  提交时间:2019/04/15
A Layout Decomposition Algorithm for Self-Aligned Multiple Patterning (CPCI-S收录) 会议论文
DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY VIII
作者:  You, Jun[1];  Liu, Hongyi[1];  Chen, Yijian[1]
收藏  |  浏览/下载:11/0  |  提交时间:2019/04/12
Intra-Cell Process Variability and Compact Modeling of LWR Effects: from Self-Aligned Multiple Patterning to Multiple-Gate MOSFETs (CPCI-S收录) 会议论文
DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION VI
作者:  Chen, Yijian[1];  Kang, Weiling[1];  Cheng, Qi[1]
收藏  |  浏览/下载:3/0  |  提交时间:2019/04/15
A Comparative Study of Self-Aligned Quadruple and Sextuple Patterning Techniques for Sub-15nm IC Scaling (CPCI-S收录) 会议论文
OPTICAL MICROLITHOGRAPHY XXVI
作者:  Chen, Yijian[1];  Kang, Weiling[1];  Zhang, Pan[1]
收藏  |  浏览/下载:8/0  |  提交时间:2019/04/15
Mandrel and Spacer Engineering Based Self-aligned Triple Patterning (CPCI-S收录) 会议论文
ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING
作者:  Chen, Yijian[1];  Cheng, Qi[1];  Kang, Weiling[1]
收藏  |  浏览/下载:2/0  |  提交时间:2019/04/15
Technological Merits, Process Complexity, and Cost Analysis of Self-aligned Multiple Patterning (CPCI-S收录) 会议论文
OPTICAL MICROLITHOGRAPHY XXV, PTS 1AND 2
作者:  Chen, Yijian[1];  Cheng, Qi[1];  Kang, Weiling[1]
收藏  |  浏览/下载:11/0  |  提交时间:2019/04/15


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