已选(0)清除
条数/页: 排序方式:
|
| Benchmarking Process Integration and Layout Decomposition of Directed Self-Assembly and Self-Aligned Multiple Patterning Techniques (CPCI-S收录) 会议论文 DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY VIII 作者: Chen, Yijian[1]; Zhou, Jun[1]; You, Jun[1]; Liu, Hongyi[1] 收藏  |  浏览/下载:3/0  |  提交时间:2019/04/12
|
| SRAM Circuit Performance in the Presence of Process Variability of Self-aligned Multiple Patterning (CPCI-S收录) 会议论文 DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION VII 作者: Xiao, Wei[1]; Cheng, Qi[1]; Chen, Yijian[1] 收藏  |  浏览/下载:6/0  |  提交时间:2019/04/15
|
| Mask Strategy and Layout Decomposition for Self-Aligned Quadruple Patterning (CPCI-S收录) 会议论文 DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION VII 作者: Kang, Weiling[1]; Feng, Chen; Chen, Yijian[1] 收藏  |  浏览/下载:2/0  |  提交时间:2019/04/15
|
| A Layout Decomposition Algorithm for Self-Aligned Multiple Patterning (CPCI-S收录) 会议论文 DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY VIII 作者: You, Jun[1]; Liu, Hongyi[1]; Chen, Yijian[1] 收藏  |  浏览/下载:11/0  |  提交时间:2019/04/12
|
| Intra-Cell Process Variability and Compact Modeling of LWR Effects: from Self-Aligned Multiple Patterning to Multiple-Gate MOSFETs (CPCI-S收录) 会议论文 DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION VI 作者: Chen, Yijian[1]; Kang, Weiling[1]; Cheng, Qi[1] 收藏  |  浏览/下载:3/0  |  提交时间:2019/04/15
|
| A Comparative Study of Self-Aligned Quadruple and Sextuple Patterning Techniques for Sub-15nm IC Scaling (CPCI-S收录) 会议论文 OPTICAL MICROLITHOGRAPHY XXVI 作者: Chen, Yijian[1]; Kang, Weiling[1]; Zhang, Pan[1] 收藏  |  浏览/下载:8/0  |  提交时间:2019/04/15
|
| Mandrel and Spacer Engineering Based Self-aligned Triple Patterning (CPCI-S收录) 会议论文 ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING 作者: Chen, Yijian[1]; Cheng, Qi[1]; Kang, Weiling[1] 收藏  |  浏览/下载:2/0  |  提交时间:2019/04/15
|
| Technological Merits, Process Complexity, and Cost Analysis of Self-aligned Multiple Patterning (CPCI-S收录) 会议论文 OPTICAL MICROLITHOGRAPHY XXV, PTS 1AND 2 作者: Chen, Yijian[1]; Cheng, Qi[1]; Kang, Weiling[1] 收藏  |  浏览/下载:11/0  |  提交时间:2019/04/15
|