CORC

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CORC

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Analysis of deposited layers with deuterium and impurity elements on samples from the divertor of JET with ITER-like wall 期刊论文
JOURNAL OF NUCLEAR MATERIALS, 2019, 卷号: 516, 期号: 无, 页码: 202-213
作者:  Strom, P.;  Petersson, P.;  Rubel, M.;  Fortuna-Zalesna, E.;  Widdowson, A.
收藏  |  浏览/下载：63/0  |  提交时间：2020/05/21
Remote plasma-enhanced atomic layer deposition of metallic TiN films with low work function and high uniformity 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2018
作者:  Zhu, Yafeng;  Rong Huang(黄荣);  Tong Liu(刘通);  Zhao, Yanfei(赵弇斐);  Yang Shen(沈阳)
收藏  |  浏览/下载：134/0  |  提交时间：2019/03/27
Critical atomic-level processing technologies: Remote plasma-enhanced atomic layer deposition and atomic layer etching 期刊论文
Micro and Nanosystems, 2018, 卷号: 10, 页码: 76-83
作者:  Guangjie Yuan[1];  Haohao Li[2];  Bo Shan[3];  Johan Liu[4]
收藏  |  浏览/下载：3/0  |  提交时间：2019/04/22
Remote plasma-enhanced atomic layer deposition of metallic TiN films with low work function and high uniformity 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2018, 卷号: 36
作者:  Zhu, Yafeng[1];  Li, Fangsen[2];  Rong Huang[3];  Tong Liu[4];  Zhao, Yanfei[5]
收藏  |  浏览/下载：19/0  |  提交时间：2019/04/22
远程等离子体辅助原子层沉积技术制备HfO2薄膜及HfO2/Ge界面性质研究 学位论文
2016, 2016
池晓伟
收藏  |  浏览/下载：4/0  |  提交时间：2017/06/20
Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure 期刊论文
JOURNAL OF MATERIALS CHEMISTRY C, 2014, 卷号: 2, 期号: [db:dc_citation_issue], 页码: 7570-7574
作者:  Zhang, Yijun;  Ren, Wei;  Jiang, Zhuangde;  Yang, Shuming;  Jing, Weixuan
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/03
Growth and characterization of GaInNAs/GaAs by plasma-assisted molecular beam epitaxy 会议论文
11th international conference on molecular beam epitaxy (mbe-xi), beijing, peoples r china, sep 11-15, 2000
Pan Z; Li LH; Zhang W; Wang XU; Lin YW; Wu RH
收藏  |  浏览/下载：13/0  |  提交时间：2010/11/15
Growth and characterization of GaInNAs/GaAs by plasma-assisted molecular beam epitaxy 期刊论文
journal of crystal growth, 2001, 卷号: 227, 期号: 0, 页码: 516-520
Pan Z; Li LH; Zhang W; Wang XU; Lin YW; Wu RH
收藏  |  浏览/下载：82/10  |  提交时间：2010/08/12

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