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Topography measurement of large-rangemicrostructures through advanced fourier-transformmethod and phase stitching in scanning broadband light interferometry 期刊论文
Micromachines, 2017, 卷号: 8, 期号: 11, 页码: 319
作者:  Zhou, Yi;  Tang, Yan;  Yang, Yong;  Hu, Song
收藏  |  浏览/下载:48/0  |  提交时间:2018/11/20
Topography measurement of micro structure by modulation-based method 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968505
作者:  Zhou, Yi;  Tang, Yan;  Liu, Junbo;  Deng, Qinyuan;  Cheng, Yiguang
收藏  |  浏览/下载:19/0  |  提交时间:2018/06/14


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