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Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2016, 卷号: 25, 期号: [db:dc_citation_issue], 页码: 954-962
作者:  Xu, Wei;  Song, Kui;  Ma, Shenhui;  Gao, Bo;  Chiu, Yi
收藏  |  浏览/下载:5/0  |  提交时间:2019/12/02
LOW-COST TEMPERATURE-COMPENSATED THERMORESISTIVE MICRO CALORIMETRIC FLOW SENSOR BY USING 0.35 mu m CMOS MEMS TECHNOLOGY 会议论文
作者:  Xu, Wei;  Gao, Bo;  Ma, Shenhui;  Zhang, Anping;  Chiu, Yi
收藏  |  浏览/下载:1/0  |  提交时间:2019/12/02
Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology 会议论文
作者:  Xu, Wei;  Gao, Bo;  Ma, Shenhui;  Zhang, Anping;  Chiu, Yi
收藏  |  浏览/下载:6/0  |  提交时间:2019/12/02


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