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CORC

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Theoretical Exposure Dose Modeling and Phase Modulation to Pattern a VLS Plane Grating with Variable-Period Scanning Beam Interference Lithography 期刊论文
Applied Sciences-Basel, 2022, 卷号: 12, 期号: 15, 页码: 13
作者:  Y. Song;  N. Zhang;  Y. J. Liu;  L. Zhang and Z. W. Liu
收藏  |  浏览/下载：0/0  |  提交时间：2023/06/14
Study on the characteristics of atomic hydrogen cleaning carbon contamination on multilayers 期刊论文
Vacuum, 2022, 卷号: 196, 页码: 11
作者:  Y. Song;  Q. P. Lu;  X. P. Gong;  D. Z. Wang;  Z. Zhang
收藏  |  浏览/下载：0/0  |  提交时间：2023/06/14
Exploration of a Flexible Metasurface for Strain Sensors: A Perspective from 2D Grating Fabrication to Spectral Characterization 期刊论文
Applied Sciences-Basel, 2022, 卷号: 12, 期号: 19, 页码: 12
作者:  H. Hu and Bayanheshig
收藏  |  浏览/下载：1/0  |  提交时间：2023/06/14
Fabrication of ultra-high aspect ratio silicon grating using an alignment method based on a scanning beam interference lithography system 期刊论文
Optics Express, 2022, 卷号: 30, 期号: 22, 页码: 40842-40853
作者:  X. S. Chen;  S. Jiang;  Y. B. Li;  Y. X. Jiang;  W. Wang and Bayanheshig
收藏  |  浏览/下载：0/0  |  提交时间：2023/06/14
Development of a High-Power Surface Grating Tunable Distributed-Feedback Bragg Semiconductor Laser Based on Gain-Coupling Effect 期刊论文
Applied Sciences-Basel, 2022, 卷号: 12, 期号: 9, 页码: 9
作者:  X. Li;  L. Liang;  L. Qin;  Y. X. Lei;  P. Jia
收藏  |  浏览/下载：0/0  |  提交时间：2023/06/14
Sub-5 nm Lithography with Single GeV Heavy Ions Using Inorganic Resist 期刊论文
NANO LETTERS, 2021, 卷号: 21, 期号: 6, 页码: 2390-2396
作者:  Liu, Qing;  Zhao, Jing;  Guo, Jinlong;  Wu, Ruqun;  Liu, Wenjing
收藏  |  浏览/下载：12/0  |  提交时间：2021/12/10
Fabrication of high-aspect-ratio polydimethylsiloxane microstructures by reducing the interfacial adhesion in soft lithography 期刊论文
Journal of Micromechanics and Microengineering, 2021, 卷号: 30, 期号: 2021, 页码: 075004
作者:  Zhou B(周波);  Su B(苏博);  Wurui, Ta;  Zenghui Yang;  Meng JH(孟军虎)
收藏  |  浏览/下载：18/0  |  提交时间：2021/12/03
Method for exposure dose monitoring and control in scanning beam interference lithography 期刊论文
Applied Optics, 2021, 卷号: 60, 期号: 10, 页码: 2767-2774
作者:  Y. Song;  Y. Liu;  S. Jiang;  Y. Zhu;  L. Zhang and Z. Liu
收藏  |  浏览/下载：4/0  |  提交时间：2022/06/13
User-friendly microfabrication method for complex topological structure and three-dimensional microchannel with the application prospect in polymerase chain reaction (PCR) 期刊论文
Analytical Chemistry, 2021, 卷号: 93, 期号: 3, 页码: 1523-1528
作者:  K. Wang;  L. He;  A. Manz and W. Wu
收藏  |  浏览/下载：4/0  |  提交时间：2022/06/13
Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling 期刊论文
Nanophotonics, 2021, 卷号: 10, 期号: 15, 页码: 3831-3842
作者:  H. B. Xie;  B. Zhao;  J. L. Cheng;  S. K. Chamoli;  T. T. Zou
收藏  |  浏览/下载：0/0  |  提交时间：2023/06/14

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