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Theoretical Model of Thermal Stress in the Film-Substrate System of Optical Thin Film
期刊论文
JOURNAL OF ELECTRONIC MATERIALS, 2022, 卷号: 51, 期号: S10, 页码: 5937-5945
作者:
Shi, Yunyun
;
Xu, Junqi
;
Li, Yang
;
Liu, Zheng
;
Zhang, Kaifeng
收藏
  |  
浏览/下载:42/0
  |  
提交时间:2022/09/28
Films
thermal stress
composite beams
residual stress
Research on the properties of HfO2optical films prepared with APS assisted electron beam evaporation deposition
会议论文
Hangzhou, China, 2021-05-23
作者:
Pan, Yong-Gang
;
Liu, Zheng
;
Li, Mian
;
Liu, Wen-Cheng
;
Bai, Long
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浏览/下载:45/0
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提交时间:2021/09/14
thin film
APS assisted deposition
Laser damage threshold
Orthogonal experiment
Influence of dry etching on the properties of SiO2 and HfO2 single layers
期刊论文
APPLIED OPTICS, 2020, 卷号: 59, 期号: 5, 页码: A128-A134
作者:
Xie, LY
;
Liu, HS
;
Zhao, J
;
Jiao, HF
;
Zhang, JL
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  |  
浏览/下载:4/0
  |  
提交时间:2021/09/06
THIN-FILMS
Charge trapping effect in HfO2-based high-k gate dielectric stacks after heavy ion irradiation: The role of oxygen vacancy
期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 卷号: 459, 页码: 143-147
作者:
Li, Zongzhen
;
Liu, Tianqi
;
Bi, Jinshun
;
Yao, Huijun
;
Zhang, Zhenxing
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  |  
浏览/下载:34/0
  |  
提交时间:2022/01/19
High-k HfO2
Heavy ion irradiation
Reliability
Charge trapping
Oxygen vacancy
Latent Reliability Degradation of Ultrathin Amorphous HfO2 Dielectric After Heavy Ion Irradiation: The Impact of Nano-Crystallization
期刊论文
IEEE ELECTRON DEVICE LETTERS, 2019, 卷号: 40, 期号: 10, 页码: 1634-1637
作者:
Li, Zongzhen
;
Liu, Jie
;
Zhai, Pengfei
;
Liu, Tianqi
;
Bi, Jinshun
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  |  
浏览/下载:10/0
  |  
提交时间:2022/01/19
HfO2
heavy ion irradiation
reliability degradation
crystallization
The Optical Absorption and Photoluminescence Characteristics of Evaporated and IAD HfO2 Thin Films
期刊论文
COATINGS, 2019, 卷号: 9, 期号: 5
作者:
Kong, Mingdong
;
Li, Bincheng
;
Guo, Chun
;
Zeng, Peng
;
Wei, Ming
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  |  
浏览/下载:9/0
  |  
提交时间:2021/05/06
HfO2 thin films
optical absorption
photoluminescence
electron-beam deposition
ion-assisted deposition (IAD)
Annealing-induced evolution in interface stability and electrical performance of sputtering-driven rare-earth-based gate oxides
期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 卷号: 778, 期号: 无, 页码: 579-587
作者:
Wang, Die
;
He, Gang
;
Liang, Shuang
;
Liu, Mao
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浏览/下载:56/0
  |  
提交时间:2020/03/31
Dy2O3 gate dielectrics
High-k
Annealing temperature
Optical properties
Electrical characteristics
Laser-induced damage threshold in HfO2/SiO2 multilayer films irradiated by beta-ray
期刊论文
CHINESE PHYSICS B, 2019, 卷号: 28, 页码: 024215
作者:
Fang, Mei-Hua
;
Tian, Peng-Yu
;
Zhu, Mao-Dong
;
Qi, Hong-Ji
;
Fei, Tao
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  |  
浏览/下载:44/0
  |  
提交时间:2019/04/02
beta-ray irradiation
HfO2/SiO2 multilayer film
residual stress
laser-induced damage threshold
Interface Modulation and Optimization of Electrical Properties of HfGdO/GaAs Gate Stacks by ALD-Derived Al2O3 Passivation Layer and Forming Gas Annealing
期刊论文
ADVANCED ELECTRONIC MATERIALS, 2018, 卷号: 4, 期号: 4, 页码: 9
作者:
Jiang, Shanshan
;
He, Gang
;
Liu, Mao
;
Zhu, Li
;
Liang, Shuang
收藏
  |  
浏览/下载:65/0
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提交时间:2019/06/10
electrical properties
forming gas annealing
high-k gate dielectrics
interface chemistry
metal-oxide-semiconductor capacitors
Endurance properties of silicon-doped hafnium oxide ferroelectric and antiferroelectric-like thin films: A comparative study and prediction
期刊论文
ACTA MATERIALIA, 2018, 卷号: 154, 页码: 190, 198
作者:
Liu, Xiaohua
;
Zhou, Dayu
;
Guan, Yan
;
Li, Shuaidong
;
Cao, Fei
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  |  
浏览/下载:27/0
  |  
提交时间:2018/12/28
Hafnium oxide
Ferroelectric
Antiferroelectric
Endurance
Phase transition
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