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CORC

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ECR sputtering and electron/ion alternative irradiation for multilayer carbon films fabrication with tunable layer thickness 期刊论文
SURFACE & COATINGS TECHNOLOGY, 2016, 卷号: 296, 期号: [db:dc_citation_issue], 页码: 26-32
作者:  Xue, Peidong;  Yang, Lei;  Diao, Dongfeng
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02
Three-layered sandwich structured carbon film prepared by sputtering and ion/electron/ion alternative irradiation 期刊论文
SURFACE & COATINGS TECHNOLOGY, 2015, 卷号: 278, 期号: [db:dc_citation_issue], 页码: 12-17
作者:  Zhang, Wenlei;  Diao, Dongfeng;  Fan, Xue
收藏  |  浏览/下载：11/0  |  提交时间：2019/12/02
Low temperature preparation of transparent, antireflective TiO2 films deposited at different O-2/Ar ratios by microwave electron cyclotron resonance magnetron sputtering 期刊论文
Vacuum, 2012, 卷号: 86, 期号: 9, 页码: 1387-1392
作者:  Du W(杜雯);  Ye YP(冶银平);  Li HX(李红轩);  Zhao F(赵飞);  Ji L(吉利)
收藏  |  浏览/下载：19/0  |  提交时间：2013/07/12
Preferential growth of helium-doped Ti films deposited by magnetron sputtering 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2009, 卷号: 27, 期号: 6, 页码: 1392-1399
作者:  Zhang, Lei;  Shi, L. Q.;  He, Z. J.;  Zhang, B.;  Wang, L. B.
收藏  |  浏览/下载：0/0  |  提交时间：2021/02/02
Deposition of dense and smooth Ti films using ECR plasma-assisted magnetron sputtering 期刊论文
SURFACE & COATINGS TECHNOLOGY, 2009, 卷号: 203, 期号: 22, 页码: 3356-3360
作者:  Zhang, L;  Shi, LQ;  He, ZJ;  Zhang, B;  Lu, YF
收藏  |  浏览/下载：19/0  |  提交时间：2016/06/29
Experiments and modification on electron cyclotron resonance ion sources at the Institute of Modern Physics 会议论文
作者:  Zhang, Z. M.;  Zhao, H. W.;  Sun, L. T.;  Cao, Y.;  Zhang, X. Z.
收藏  |  浏览/下载：8/0  |  提交时间：2018/08/20
Experiments and modification on electron cyclotron resonance ion sources at the Institute of Modern Physics 会议论文
作者:  Zhang, Z. M.;  Zhao, H. W.;  Sun, L. T.;  Cao, Y.;  Zhang, X. Z.
收藏  |  浏览/下载：9/0  |  提交时间：2018/08/20
Experiments and modification on electron cyclotron resonance ion sources at the Institute of Modern Physics 期刊论文
REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 卷号: 77, 期号: 3, 页码: 3
作者:  He, W.;  Zhang, Z. M.;  Zhao, H. W.;  Sun, L. T.;  Cao, Y.
收藏  |  浏览/下载：6/0  |  提交时间：2010/10/29
Structure and tribology property of carbon nitride films deposited by MW-ECR plasma enhanced unbalanced magnetron sputtering 期刊论文
Plasma Science & Technology, 2006, 卷号: 8, 期号: 4, 页码: 425-428
P. Gao; J. Xu; Y. Piao; W. Y. Ding; X. L. Deng; C. Dong
收藏  |  浏览/下载：12/0  |  提交时间：2012/04/13
Fabrication of lithium phosphorus oxynitride (LiPON) thin films by r.f. sputtering coupled with electron cyclotron resonance 期刊论文
JOURNAL OF INORGANIC MATERIALS, 2006, 卷号: 21
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收藏  |  浏览/下载：3/0  |  提交时间：2020/10/26

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