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A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment 期刊论文
Mechanical Systems and Signal Processing, 2021, 卷号: 155
作者:  P.-Z. Li;  D.-F. Zhang;  B. Lennox and F. Arvin
收藏  |  浏览/下载：2/0  |  提交时间：2022/06/13
A prototype experiment of the adaptive deformable mirror based on voice coil and Eddy Current Sensor 会议论文
Melbourne, Australia, 2019-12
作者:  Zuo H(左恒);  Li H(李浩);  Zhou GH(周国华);  Li GP(李国平)
收藏  |  浏览/下载：2/0  |  提交时间：2020/02/04
Surface-driven actuation: Sign reversal under load and surface load-memory effect 期刊论文
PHYSICAL REVIEW MATERIALS, 2019, 卷号: 3, 期号: 6, 页码: 7
作者:  Liu, Ling-Zhi;  Mameka, Nadiia;  Markmann, Juergen;  Jin, Hai-Jun;  Weissmueller, Joerg
收藏  |  浏览/下载：22/0  |  提交时间：2021/02/02
扫频激光器扫描非线性的优化及其在光纤光栅解调中的应用 期刊论文
2016, 2016
梅佳伟; 肖晓晟; 杨昌喜; MEI Jia-wei; XIAO Xiao-sheng; YANG Chang-xi
收藏  |  浏览/下载：11/0
A fast high voltage driver for the piezoelectric fast steering mirror 会议论文
Proceedings of SPIE: 20th International Symposium on High Power Systems and Applications 2014, HPLS and A 2014, 2015
作者:  Fan, Muwen;  Huang, Linhai;  Li, Mei;  Rao, Changhui;  Luo, Xi
收藏  |  浏览/下载：18/0  |  提交时间：2016/11/24
High-isolation lateral RF MEMS capacitive switch based on HfO2 dielectric for high frequency applications 其他
2012-01-01
He, X. J.; Lv, Z. Q.; Liu, B.; Li, Z. H.
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/10
Silicon-on-insulator out-of-plane electrostatic actuator with in situ capacitive position sensing 期刊论文
journal of micro nanolithography mems and moems, 2012
Wang, Jiankun; Yang, Zhenchuan; Yan, Guizhen
收藏  |  浏览/下载：6/0  |  提交时间：2015/11/13
Study on dielectric charging in low-stress silicon nitride with the MIS structure for reliable MEMS applications 期刊论文
http://dx.doi.org/10.1088/0960-1317/21/12/125019, 2011
San, Haisheng; Deng, Zhiqiang; Yu, Yuxi; Li, Gang; Chen, Xuyuan; 余煜玺
收藏  |  浏览/下载：6/0  |  提交时间：2013/12/12
Electrothermally actuated RF MEMS capacitive switch with atomic layer deposited (ALD) dielectrics 其他
2011-01-01
He, X.J.; Lv, Z.Q.; Liu, B.; Li, Z.H.
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
Error analysis of capacitance detector diodes in micro machined accelerometers 期刊论文
2010, 2010
Hu Hao; Dong Jingxin; Wan Caixin; Liu Yunfeng
收藏  |  浏览/下载：5/0

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