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长春光学精密机械与物... [1]
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会议论文 [1]
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2012 [1]
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专题:长春光学精密机械与物理研究所
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Research on load-bearing characteristics of precision air-bearing rotary stage (EI CONFERENCE)
会议论文
3rd international Conference on Manufacturing Science and Engineering, ICMSE 2012, March 27, 2012 - March 29, 2012, Xiamen, China
Lin J.
;
Wang L.
;
Gao M.
;
Ran T.
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提交时间:2013/03/25
Air-bearing is a core component of air-bearing rotary stage. The weakness that the air-bearing has the low load capacity and stiffness has been concerned about by domestic and foreign scholars. So how to improve the load capacity and stiffness has become a serious problem. In order to improve the load capacity and stiffness of the air-bearing rotary stage
in this paper
we improved structure of Zhang Wenjie and others' high-precision direct-drive air-bearing rotary stage. The gas film of air-bearing has been meshed by GAMBIT software
and we use FLUENT software to obtain the carrying capacity features of the gas film. Finally
the structural static force of the precision air-bearing rotary stage will be analyzed by ANSYS software. The analysis results show that: the structural design of the precision air-bearing rotary stage is reasonable
and this structure can provide a larger range of loads. Even in heavy load conditions
a larger deformation will not occur any more. It has a good practical value
and also can be widely used in high precision equipments. (2012) Trans Tech Publications.
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