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Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2018, 卷号: 30, 期号: 4, 页码: 379-382
作者:  Deng, Qinyuan;  Liu, Junbo;  Tang, Yan;  Zhou, Yi;  Yang, Yong
收藏  |  浏览/下载:34/0  |  提交时间:2019/08/23
Spatial modulation assisted scanning white-light interferometry for noise suppression 期刊论文
IEEE Photonics Technology Letters, 2017
作者:  Deng, Qinyuan;  Liu, Junbo;  Tang, Yan;  Zhou, Yi;  Yang, Yong
收藏  |  浏览/下载:21/0  |  提交时间:2018/11/20
Novel Quadruple-Band Microwave Metamaterial Absorber 期刊论文
IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 1
作者:  Wang, Nan;  Tong, Junmin;  Zhou, Weicheng;  Jiang, Wei;  Li, Jinlong
收藏  |  浏览/下载:42/0  |  提交时间:2015/07/10
Novel quadruple-band microwave metamaterial absorber 期刊论文
IEEE Photonics Journal, 2015, 卷号: 7, 期号: 1, 页码: 7029014
作者:  Wang, Nan;  Tong, Junmin;  Zhou, Weicheng;  Jiang, Wei;  Li, Jinlong
收藏  |  浏览/下载:16/0  |  提交时间:2016/11/23
Study of the influence of the shape of projection lens focal plane on the focus control of advanced lithography 期刊论文
OPTIK, 2014, 卷号: 125, 期号: 22, 页码: 6775-6777
作者:  Li, Jinlong;  Hu, Song;  Zhao, Lixin
收藏  |  浏览/下载:10/0  |  提交时间:2015/07/10
Study of the influence of the shape of projection lens focal plane on the focus control of advanced lithography 期刊论文
Optik, 2014, 卷号: 125, 期号: 22, 页码: 6775-6777
作者:  Li, Jinlong;  Hu, Song;  Zhao, Lixin
收藏  |  浏览/下载:10/0  |  提交时间:2016/11/23
A scenes recognition method based on image complexity 会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 2014
作者:  Song, Qinghuan;  Chen, Zhongbi;  Sun, Shaohua;  Hu, Jinlong;  Cheng, Hua
收藏  |  浏览/下载:13/0  |  提交时间:2016/11/24
Single closed fringe pattern phase demodulation in alignment of nanolithography 期刊论文
OPTIK, 2013, 卷号: 124, 期号: 9, 页码: 818-823
作者:  Xu, Feng;  Hu, Song;  Yang, Yong;  Li, Jinlong;  Li, Lanlan
收藏  |  浏览/下载:16/0  |  提交时间:2015/04/17
A new synchronization control method of wafer and reticle stage in step and scan lithographic equipment 期刊论文
OPTIK, 2013, 卷号: 124, 期号: 24, 页码: 6861-6865
作者:  Li, Lanlan;  Hu, Song;  Zhao, Lixin;  Ma, Ping;  Li, Jinlong
收藏  |  浏览/下载:36/0  |  提交时间:2015/04/17
Single closed fringe pattern phase demodulation in alignment of nanolithography 期刊论文
Optik, 2013, 卷号: 124, 期号: 9, 页码: 818-823
作者:  Xu, Feng;  Hu, Song;  Yang, Yong;  Li, Jinlong;  Li, Lanlan
收藏  |  浏览/下载:8/0  |  提交时间:2016/11/23


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