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Force rebalance control for a MEMS gyroscope using ascending frequency drive and generalized PI control 其他
2016-01-01
He, Chun-Hua; Huang, Qin-Wen; Zhao, Qian-Cheng; Yang, Zhen-Chuan; Zhang, Da-Cheng; Yan, Gui-Zhen
收藏  |  浏览/下载:4/0  |  提交时间:2017/12/03
Wafer-level vacuum packaging with lateral interconnections and vertical feedthroughs for microelectromechanical system gyroscopes 其他
2011-01-01
Zhao, Qian Cheng; Yang, Zhen Chuan; Guo, Zhong Yang; Ding, Hai Tao; Li, Mo; Yan, Gui Zhen
收藏  |  浏览/下载:3/0  |  提交时间:2017/12/03


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