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浏览/检索结果: 共5条，第1-5条 帮助 限定条件 内容类型：其他     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 A high-resolution silicon-on-glass z axis gyroscope operating at atmospheric pressure 其他 2010-01-01 Ding, Haitao; Liu, Xuesong; Lin, Longtao; Chi, Xiaozhu; Cui, Jian; Kraft, Michael; Yang, Zhenchuan; Yan, Guizhen 收藏  |  浏览/下载：4/0  |  提交时间：2017/12/03 A bulk micromachined z-axis single crystal silicon gyroscope for commercial applications 其他 2008-01-01 Ding, Haitao; Liu, Xuesong; Cui, Jian; Chi, Xiaozhu; Guo, Zhongyang; Yang, Zhenchuan; Yan, Guizhen 收藏  |  浏览/下载：4/0  |  提交时间：2015/11/10 bulk microntachine  gyroscope  silicon on glass  deep reactive ion etching   A highly double-decoupled self-oscillation gyroscope operating at atmospheric pressure 其他 2008-01-01 Ding, Haitao; Cui, Jian; Liu, Xuesong; Chi, Xiaozhu; Yang, Zhenchuan; Yan, Guizhen 收藏  |  浏览/下载：2/0  |  提交时间：2015/11/10 Simulation and test of a doubly decoupled lateral axis gyroscope 其他 2007-01-01 Liu, Xuesong; Lv, Bo; Yang, Zhenchuan; Ding, Haitao; Yan, Guizhen 收藏  |  浏览/下载：2/0  |  提交时间：2015/11/13 Design and fabrication of a lateral axis gyroscope with asymmetric comb-fingers as sensing capacitors 其他 2006-01-01 Liu, Xuesong; Yang, Zhengchuan; Yan, Guizhen; Fan, Jie; Ding, Haitao; Liu, Ye 收藏  |  浏览/下载：7/0  |  提交时间：2015/11/16 gyroscope  vertical comb  bulk micromachined  doubly decoupled  out-of-plane movement