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Influence of CH(4) on the morphology of nanocrystalline diamond films deposited by Ar rich microwave plasma 期刊论文
JOURNAL OF APPLIED PHYSICS, 2010, 卷号: 107, 期号: 11, 页码: 4
Rakha, SA; Yu, GJ; Cao, JQ; He, SX; Zhou, XT
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