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Fabrication of Direct Silicon Bonded Hybrid Orientation Substrate by Separation by Implanted Oxygen Layer Transfer and Oxide Dissolution Annealing 期刊论文
APPLIED PHYSICS EXPRESS, 2011, 卷号: 4, 期号: 3, 页码: 31301
Wei,X; Xue,ZY; Wu,AM; Cao,GB; Zhang,B; Lin,CL; Zhang,MA; Wang,X
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