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浏览/检索结果: 共3条，第1-3条 帮助 限定条件 发表日期：2014    专题：湖南大学    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Improving the adhesion of hydrogen silsesquioxane onto various substrates for electron-beam lithography by surface chemical modification 期刊论文 Microelectronic Engineering, 2014, 卷号: Vol.128, 页码: 59-65 作者:  Zhang, Zhiqiang;  Duan, Huigao;  Wu, Yihui;  Zhou, Wuping;  Liu, Cong 收藏  |  浏览/下载：2/0  |  提交时间：2019/12/31 Improving the adhesion of hydrogen silsesquioxane onto various substrates for electron-beam lithography by surface chemical modification 期刊论文 Microelectronic Engineering, 2014, 卷号: Vol.128, 页码: 59-65 作者:  Zhang, Zhiqiang;  Duan, Huigao;  Wu, Yihui;  Zhou, Wuping;  Liu, Cong 收藏  |  浏览/下载：3/0  |  提交时间：2019/12/31 Improving the adhesion of hydrogen silsesquioxane (HSQ) onto various substrates for electron-beam lithography by surface chemical modification 期刊论文 Microelectronic Engineering, 2014, 卷号: Vol.128, 页码: 59-65 作者:  Zhang, Zhiqiang;  Duan, Huigao;  Wu, Yihui;  Zhou, Wuping;  Liu, Cong 收藏  |  浏览/下载：5/0  |  提交时间：2019/12/31 Electron-beam lithography  Hydrogen silsesquioxane (HSQ)  Adhesion  Chemical modification