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Parylene C-on-photoresist (POP): a low temperature spacer scheme for polymer/metal nanowire fabrication 期刊论文
journal of micromechanics and microengineering, 2011
Li, Yuanhui; Xie, Quan; Wang, Wei; Zheng, Mingxin; Zhang, Hao; Lei, Yinhua; Zhang, Haixia Alice; Wu, Wengang; Li, Zhihong
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