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Composition dependence of interface control and optimization on the performance of an HfTiON gate dielectric metal-oxide-semiconductor capacitor 期刊论文
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2011, 卷号: 26, 期号: 10
作者:  He, G;  Sun, ZQ;  Ma, YQ;  Wu, MZ;  Liu, YM
收藏  |  浏览/下载:10/0  |  提交时间:2012/07/10


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