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Glass micro-nanofluidic chip aligning assembling method, involves driving cover sheet to move by precise micromotion unit, and carrying out hot pre-connecting for aligned glass micro-nanofluidic chip by micro-heating process. 专利
申请日期: 2010-01-01, 公开日期: 2010-04-07
作者:  DU L LIU C LIU J WANG D WEN J XU Z
收藏  |  浏览/下载:1/0  |  提交时间:2019/12/24
Vacuum robot for use in semiconductor cluster tool, has deep groove ball bearing connected with magnetic pole by shaft sleeve, and permanent magnet arranged in direction of center shaft of engine base. 专利
申请日期: 2010-01-01, 公开日期: 2010-03-10
作者:  CONG M DAI P DU Y WEN H
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