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Nd3+-doped colloidal SiO2 composite abrasives: Synthesis and the effects on chemical mechanical polishing (CMP) performances of sapphire wafers 期刊论文
APPLIED SURFACE SCIENCE, 2017, 卷号: 413, 页码: 16-26
作者:  Liu, Tingting[1];  Lei, Hong[2]
收藏  |  浏览/下载:9/0  |  提交时间:2019/04/24
Abrasive-free Chemical Polishing of Hard Disk Substrate with Benzoyl Peroxide-H2O2 Slurry 会议论文
Design, Manufacturing and Mechatronics, 2014-03-21
作者:  Jiang, Ting[1];  Lei, Hong[2]
收藏  |  浏览/下载:2/0  |  提交时间:2019/04/30
Abrasive-free polishing of hard disk substrate with H2O2-K2S2O8-NaHSO3 slurry 会议论文
MATERIAL DESIGN, PROCESSING AND APPLICATIONS, PARTS 1-4, 2013-03-30
作者:  Zhang, Weitao[1];  Lei, Hong[2]
收藏  |  浏览/下载:2/0  |  提交时间:2019/04/30


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