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Application of twisting algorithm to a 2D electrostatic MEMS micromirror (EI收录) 会议论文
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings, Suzhou, China, August 26, 2013 - August 30, 2013
作者:  Chen, Hui[1];  Pallapa, Manu[2];  Sun, Weijie[1];  Sun, Zhendong[1];  Yeow, John T. W.[2]
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